A micropump driven by continuous electrowetting actuation for low voltage and low power operations

Kwang Seok Yun, Ii Joo Cho, Jong Uk Bu, Geun Ho Kim, Young Sam Jeon, Chang Jin Kim, Euisik Yoon

Research output: Contribution to journalArticle

39 Citations (Scopus)

Abstract

In this paper we first report a micropump actuated by continuous electrowetting (CEW). We have used the surface-tension-induced motion of a mercury drop in the microchannel filled with an electrolyte as actuation energy. We have fabricated the CEW actuator, silicone rubber pumping membranes and copper flap check valves, and have demonstrated actual liquid pumping up to 63μl/min at the applied voltage of 2.3Vpp. The maximum pump pressure is about 600Pa at the applied voltage of 2.3Vpp with operation frequency of 10Hz.

Original languageEnglish
Pages (from-to)487-490
Number of pages4
JournalProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
DOIs
Publication statusPublished - 2001 Jan 1

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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