A modified polyimide and its application to a microwave relative humidity sensor

Yong Ho Kim, Joon Ik Lee, Kyu Ho Shin, Yong Jun Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports a modified polyimide and its application to a microwave relative humidity (RH) sensor. For a highly sensitive moisture sensing layer, a polyimide was synthesized from oxidianiline (ODA), m-pyromellitic dianhydride (m-PMDA) and N-methlypyrrolidone (NMP) instead of using a commercial polyimide. The synthesized polyimide was applied to a microwave humidity sensor, CPW-to-slotline ring resonator in this case. Characteristics of the fabricated microwave humidity sensor including sensitivity, hysteresis and stability were analyzed for various relative humidity levels. Sensitivity of the RH sensor, in terms of resonant frequency change, was 181 kHz/%RH, hysteresis was 0.013%, and deviation from an average resonant frequency was 0.002% at 40%RH.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages1848-1851
Number of pages4
Publication statusPublished - 2005
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume2

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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