A monolithic RMS-DC converter using planar diaphragm structures

Euisik Yoon, Kensall D. Wise

Research output: Contribution to journalConference article

4 Citations (Scopus)

Abstract

A monolithic RMS-DC converter for measuring wideband RMS signals is presented. Two identical thermoelements for thermal RMS-DC conversion are formed using planar diaphragm structures and micromachined dielectric windows. Each thermoelement consists of two polysilicon heaters and a thin-film temperature sensor located on a window and operated at constant temperature using on-chip control feedback circuitry. The thermoelements achieve a thermal efficiency greater than 7°C/mW with thermal time constant less than 5 ms. The on-chip control circuitry is realized using a standard 3-μm p-well CMOS process with minor modifications for process compatibility with the dielectric window formation. This converter measures RMS signals over a full scale range of 1 V RMS, handles crest factors in excess of five, exhibits a typical nonlinearity of less than 1%, and achieves a 3-dB bandwidth greater than 20 MHz.

Original languageEnglish
Pages (from-to)491-494
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting
Publication statusPublished - 1989 Dec 1
Event1989 International Electron Devices Meeting - Technical Digest - Washington, DC, USA
Duration: 1989 Dec 31989 Dec 6

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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