Abstract
A monolithic RMS-DC converter for measuring wideband RMS signals is presented. Two identical thermoelements for thermal RMS-DC conversion are formed using planar diaphragm structures and micromachined dielectric windows. Each thermoelement consists of two polysilicon heaters and a thin-film temperature sensor located on a window and operated at constant temperature using on-chip control feedback circuitry. The thermoelements achieve a thermal efficiency greater than 7°C/mW with thermal time constant less than 5 ms. The on-chip control circuitry is realized using a standard 3-μm p-well CMOS process with minor modifications for process compatibility with the dielectric window formation. This converter measures RMS signals over a full scale range of 1 V RMS, handles crest factors in excess of five, exhibits a typical nonlinearity of less than 1%, and achieves a 3-dB bandwidth greater than 20 MHz.
| Original language | English |
|---|---|
| Pages (from-to) | 491-494 |
| Number of pages | 4 |
| Journal | Technical Digest - International Electron Devices Meeting |
| Publication status | Published - 1989 Dec 1 |
| Event | 1989 International Electron Devices Meeting - Technical Digest - Washington, DC, USA Duration: 1989 Dec 3 → 1989 Dec 6 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry
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A monolithic RMS-DC converter using planar diaphragm structures. / Yoon, Euisik; Wise, Kensall D.
In: Technical Digest - International Electron Devices Meeting, 01.12.1989, p. 491-494.Research output: Contribution to journal › Conference article
TY - JOUR
T1 - A monolithic RMS-DC converter using planar diaphragm structures
AU - Yoon, Euisik
AU - Wise, Kensall D.
PY - 1989/12/1
Y1 - 1989/12/1
N2 - A monolithic RMS-DC converter for measuring wideband RMS signals is presented. Two identical thermoelements for thermal RMS-DC conversion are formed using planar diaphragm structures and micromachined dielectric windows. Each thermoelement consists of two polysilicon heaters and a thin-film temperature sensor located on a window and operated at constant temperature using on-chip control feedback circuitry. The thermoelements achieve a thermal efficiency greater than 7°C/mW with thermal time constant less than 5 ms. The on-chip control circuitry is realized using a standard 3-μm p-well CMOS process with minor modifications for process compatibility with the dielectric window formation. This converter measures RMS signals over a full scale range of 1 V RMS, handles crest factors in excess of five, exhibits a typical nonlinearity of less than 1%, and achieves a 3-dB bandwidth greater than 20 MHz.
AB - A monolithic RMS-DC converter for measuring wideband RMS signals is presented. Two identical thermoelements for thermal RMS-DC conversion are formed using planar diaphragm structures and micromachined dielectric windows. Each thermoelement consists of two polysilicon heaters and a thin-film temperature sensor located on a window and operated at constant temperature using on-chip control feedback circuitry. The thermoelements achieve a thermal efficiency greater than 7°C/mW with thermal time constant less than 5 ms. The on-chip control circuitry is realized using a standard 3-μm p-well CMOS process with minor modifications for process compatibility with the dielectric window formation. This converter measures RMS signals over a full scale range of 1 V RMS, handles crest factors in excess of five, exhibits a typical nonlinearity of less than 1%, and achieves a 3-dB bandwidth greater than 20 MHz.
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M3 - Conference article
AN - SCOPUS:0024870096
SP - 491
EP - 494
JO - Technical Digest - International Electron Devices Meeting
JF - Technical Digest - International Electron Devices Meeting
SN - 0163-1918
ER -