A monolithic RMS-DC converter using planar diaphragm structures

Euisik Yoon, Kensall D. Wise

Research output: Contribution to journalConference article

4 Citations (Scopus)

Abstract

A monolithic RMS-DC converter for measuring wideband RMS signals is presented. Two identical thermoelements for thermal RMS-DC conversion are formed using planar diaphragm structures and micromachined dielectric windows. Each thermoelement consists of two polysilicon heaters and a thin-film temperature sensor located on a window and operated at constant temperature using on-chip control feedback circuitry. The thermoelements achieve a thermal efficiency greater than 7°C/mW with thermal time constant less than 5 ms. The on-chip control circuitry is realized using a standard 3-μm p-well CMOS process with minor modifications for process compatibility with the dielectric window formation. This converter measures RMS signals over a full scale range of 1 V RMS, handles crest factors in excess of five, exhibits a typical nonlinearity of less than 1%, and achieves a 3-dB bandwidth greater than 20 MHz.

Original languageEnglish
Pages (from-to)491-494
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting
Publication statusPublished - 1989 Dec 1
Event1989 International Electron Devices Meeting - Technical Digest - Washington, DC, USA
Duration: 1989 Dec 31989 Dec 6

Fingerprint

diaphragms
Diaphragms
converters
direct current
chips
thermodynamic efficiency
temperature sensors
Temperature sensors
feedback control
heaters
Polysilicon
compatibility
time constant
Feedback control
CMOS
nonlinearity
broadband
bandwidth
Bandwidth
Thin films

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

@article{b5a38cf96cab4b1bb37af23c53fc6827,
title = "A monolithic RMS-DC converter using planar diaphragm structures",
abstract = "A monolithic RMS-DC converter for measuring wideband RMS signals is presented. Two identical thermoelements for thermal RMS-DC conversion are formed using planar diaphragm structures and micromachined dielectric windows. Each thermoelement consists of two polysilicon heaters and a thin-film temperature sensor located on a window and operated at constant temperature using on-chip control feedback circuitry. The thermoelements achieve a thermal efficiency greater than 7°C/mW with thermal time constant less than 5 ms. The on-chip control circuitry is realized using a standard 3-μm p-well CMOS process with minor modifications for process compatibility with the dielectric window formation. This converter measures RMS signals over a full scale range of 1 V RMS, handles crest factors in excess of five, exhibits a typical nonlinearity of less than 1{\%}, and achieves a 3-dB bandwidth greater than 20 MHz.",
author = "Euisik Yoon and Wise, {Kensall D.}",
year = "1989",
month = "12",
day = "1",
language = "English",
pages = "491--494",
journal = "Technical Digest - International Electron Devices Meeting",
issn = "0163-1918",
publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

A monolithic RMS-DC converter using planar diaphragm structures. / Yoon, Euisik; Wise, Kensall D.

In: Technical Digest - International Electron Devices Meeting, 01.12.1989, p. 491-494.

Research output: Contribution to journalConference article

TY - JOUR

T1 - A monolithic RMS-DC converter using planar diaphragm structures

AU - Yoon, Euisik

AU - Wise, Kensall D.

PY - 1989/12/1

Y1 - 1989/12/1

N2 - A monolithic RMS-DC converter for measuring wideband RMS signals is presented. Two identical thermoelements for thermal RMS-DC conversion are formed using planar diaphragm structures and micromachined dielectric windows. Each thermoelement consists of two polysilicon heaters and a thin-film temperature sensor located on a window and operated at constant temperature using on-chip control feedback circuitry. The thermoelements achieve a thermal efficiency greater than 7°C/mW with thermal time constant less than 5 ms. The on-chip control circuitry is realized using a standard 3-μm p-well CMOS process with minor modifications for process compatibility with the dielectric window formation. This converter measures RMS signals over a full scale range of 1 V RMS, handles crest factors in excess of five, exhibits a typical nonlinearity of less than 1%, and achieves a 3-dB bandwidth greater than 20 MHz.

AB - A monolithic RMS-DC converter for measuring wideband RMS signals is presented. Two identical thermoelements for thermal RMS-DC conversion are formed using planar diaphragm structures and micromachined dielectric windows. Each thermoelement consists of two polysilicon heaters and a thin-film temperature sensor located on a window and operated at constant temperature using on-chip control feedback circuitry. The thermoelements achieve a thermal efficiency greater than 7°C/mW with thermal time constant less than 5 ms. The on-chip control circuitry is realized using a standard 3-μm p-well CMOS process with minor modifications for process compatibility with the dielectric window formation. This converter measures RMS signals over a full scale range of 1 V RMS, handles crest factors in excess of five, exhibits a typical nonlinearity of less than 1%, and achieves a 3-dB bandwidth greater than 20 MHz.

UR - http://www.scopus.com/inward/record.url?scp=0024870096&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0024870096&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0024870096

SP - 491

EP - 494

JO - Technical Digest - International Electron Devices Meeting

JF - Technical Digest - International Electron Devices Meeting

SN - 0163-1918

ER -