Abstract
The implementation of control circuitry is presented for a multielement mass flow sensor capable of simultaneously measuring five different gas-related parameters necessary for mass flow. A process has been developed to merge the micromachined sensing structures and the CMOS readout circuitry on a single chip. The total process requires thirteen masks: eight for the double-poly, single-metal CMOS process and five for additional processing of the transducer elements. The on-chip circuitry includes offset-free instrumentation amplifiers, an analog multiplexer, heater drive circuits, self-test circuitry, and a bandgap temperature sensor using substrate n-p-n bipolar transistors. The resulting multielement chip requires only ten external pins and delivers high-level buffered output signals describing gas velocity, type, direction, pressure, and temperature.
Original language | English |
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Pages | 161-164 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 1990 |
Event | 1990 IEEE Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA Duration: 1990 Jun 4 → 1990 Jun 7 |
Conference
Conference | 1990 IEEE Solid-State Sensor and Actuator Workshop |
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City | Hilton Head Island, SC, USA |
Period | 90/6/4 → 90/6/7 |
All Science Journal Classification (ASJC) codes
- Engineering(all)