A multi-element monolithic mass flowmeter with on-chip CMOS readout electronics

Euisik Yoon, Kensall D. Wise

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

This paper reports the implementation of control circuitry for a multi-element mass flow sensor capable of simultaneously measuring five different gas-related parameters necessary for mass flow. A process has been developed to merge the micromachined sensing structures and the CMOS readout circuitry on a single chip. The total process requires thirteen masks: eight for the double-poly single-metal CMOS process and five for additional processing of the transducer elements. The on-chip circuitry includes offset-free instrumentation amplifiers, an analog multiplexer, heater drive circuits, self-test circuitry, and a band-gap temperature sensor using substrate npn bipolar transistors. The resulting multi-element chip requires only ten external pins and delivers high-level buffered output signals describing gas velocity, type, direction, pressure, and temperature. The chip dissipates 120mW from is ±5V supplies and measures 3.5mm ×5mm in 3¼m features.

Original languageEnglish
Title of host publicationMicromechanics and MEMS
Subtitle of host publicationClassic and Seminal Papers to 1990
PublisherWiley-IEEE Press
Pages495-498
Number of pages4
ISBN (Electronic)9780470545263
ISBN (Print)0780310853, 9780780310858
DOIs
Publication statusPublished - 1997 Jan 1

Fingerprint

flowmeters
Flowmeters
readout
CMOS
Electronic equipment
chips
mass flow
Bipolar transistors
Temperature sensors
Gases
electronics
Masks
Transducers
Energy gap
self tests
Networks (circuits)
Sensors
temperature sensors
Substrates
Processing

All Science Journal Classification (ASJC) codes

  • Computer Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)
  • Energy(all)

Cite this

Yoon, E., & Wise, K. D. (1997). A multi-element monolithic mass flowmeter with on-chip CMOS readout electronics. In Micromechanics and MEMS: Classic and Seminal Papers to 1990 (pp. 495-498). Wiley-IEEE Press. https://doi.org/10.1109/9780470545263.sect9
Yoon, Euisik ; Wise, Kensall D. / A multi-element monolithic mass flowmeter with on-chip CMOS readout electronics. Micromechanics and MEMS: Classic and Seminal Papers to 1990. Wiley-IEEE Press, 1997. pp. 495-498
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Yoon, E & Wise, KD 1997, A multi-element monolithic mass flowmeter with on-chip CMOS readout electronics. in Micromechanics and MEMS: Classic and Seminal Papers to 1990. Wiley-IEEE Press, pp. 495-498. https://doi.org/10.1109/9780470545263.sect9

A multi-element monolithic mass flowmeter with on-chip CMOS readout electronics. / Yoon, Euisik; Wise, Kensall D.

Micromechanics and MEMS: Classic and Seminal Papers to 1990. Wiley-IEEE Press, 1997. p. 495-498.

Research output: Chapter in Book/Report/Conference proceedingChapter

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Yoon E, Wise KD. A multi-element monolithic mass flowmeter with on-chip CMOS readout electronics. In Micromechanics and MEMS: Classic and Seminal Papers to 1990. Wiley-IEEE Press. 1997. p. 495-498 https://doi.org/10.1109/9780470545263.sect9