A multi-element monolithic mass flowmeter with on-chip CMOS readout electronics

Euisik Yoon, Kensall D. Wise

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

This paper reports the implementation of control circuitry for a multi-element mass flow sensor capable of simultaneously measuring five different gas-related parameters necessary for mass flow. A process has been developed to merge the micromachined sensing structures and the CMOS readout circuitry on a single chip. The total process requires thirteen masks: eight for the double-poly single-metal CMOS process and five for additional processing of the transducer elements. The on-chip circuitry includes offset-free instrumentation amplifiers, an analog multiplexer, heater drive circuits, self-test circuitry, and a band-gap temperature sensor using substrate npn bipolar transistors. The resulting multi-element chip requires only ten external pins and delivers high-level buffered output signals describing gas velocity, type, direction, pressure, and temperature. The chip dissipates 120mW from is ±5V supplies and measures 3.5mm ×5mm in 3¼m features.

Original languageEnglish
Title of host publicationMicromechanics and MEMS
Subtitle of host publicationClassic and Seminal Papers to 1990
PublisherWiley-IEEE Press
Pages495-498
Number of pages4
ISBN (Electronic)9780470545263
ISBN (Print)0780310853, 9780780310858
DOIs
Publication statusPublished - 1997 Jan 1

All Science Journal Classification (ASJC) codes

  • Computer Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)
  • Energy(all)

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    Yoon, E., & Wise, K. D. (1997). A multi-element monolithic mass flowmeter with on-chip CMOS readout electronics. In Micromechanics and MEMS: Classic and Seminal Papers to 1990 (pp. 495-498). Wiley-IEEE Press. https://doi.org/10.1109/9780470545263.sect9