A new approach of polycrystalline silicon film on plastic substrate prepared by ion beam deposition followed by excimer laser crystallization at room temperature

Jang Yeon Kwon, Hyuck Lim, Kyung Bae Park, Ji Sim Jung, Do Young Kim, Hans S. Cho, Seok Pil Kim, Young Soo Park, Jong Man Kim, Takashi Noguchi

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

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Engineering & Materials Science

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