A novel accelerometer based on contact resistance of integrated carbon nanotubes

Jae Ik Lee, Youngkee Eun, Han Il Jung, Jungwook Choi, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

A novel accelerometer based on electrical contact resistance change between two sets of carbon nanotubes (CNTs) is presented. After the micro structures are fabricated by silicon bulk micromachining, the CNTs are synthesized from each of the facing surfaces of proof-mass and fixed electrode. When the motion of the proof-mass is generated from incoming acceleration, effective contact area between two sets of CNT bundles changes, resulting in a change of electrical contact resistance. This CNTs-based accelerometer achieves both high sensitivity and wide bandwidth. Two different sensing modes are experimentally verified and compared: the approach mode where the incoming acceleration pushes the proof-mass to the fixed electrode and the separation mode where the acceleration pulls away the proof-mass from the fixed electrode. In each case, the sensitivities are 7.62 mV/g/V and 17.23 mV/g/V, respectively. It is confirmed that the contact resistance remained nearly constant after 14.4 million cycles of operation under 400 Hz sinusoidal acceleration with the magnitude of -10 g ∼ +10 g.

Original languageEnglish
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages533-536
Number of pages4
DOIs
Publication statusPublished - 2011 Apr 13
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 2011 Jan 232011 Jan 27

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period11/1/2311/1/27

Fingerprint

Carbon Nanotubes
accelerometers
Contact resistance
contact resistance
Accelerometers
Carbon nanotubes
carbon nanotubes
Electrodes
electrodes
sensitivity
Micromachining
Silicon
micromachining
bundles
bandwidth
Bandwidth
microstructure
Microstructure
cycles
silicon

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Lee, J. I., Eun, Y., Jung, H. I., Choi, J., & Kim, J. (2011). A novel accelerometer based on contact resistance of integrated carbon nanotubes. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 533-536). [5734479] https://doi.org/10.1109/MEMSYS.2011.5734479
Lee, Jae Ik ; Eun, Youngkee ; Jung, Han Il ; Choi, Jungwook ; Kim, Jongbaeg. / A novel accelerometer based on contact resistance of integrated carbon nanotubes. 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. pp. 533-536
@inproceedings{fc5dae69451f4c098087577cb75c92cb,
title = "A novel accelerometer based on contact resistance of integrated carbon nanotubes",
abstract = "A novel accelerometer based on electrical contact resistance change between two sets of carbon nanotubes (CNTs) is presented. After the micro structures are fabricated by silicon bulk micromachining, the CNTs are synthesized from each of the facing surfaces of proof-mass and fixed electrode. When the motion of the proof-mass is generated from incoming acceleration, effective contact area between two sets of CNT bundles changes, resulting in a change of electrical contact resistance. This CNTs-based accelerometer achieves both high sensitivity and wide bandwidth. Two different sensing modes are experimentally verified and compared: the approach mode where the incoming acceleration pushes the proof-mass to the fixed electrode and the separation mode where the acceleration pulls away the proof-mass from the fixed electrode. In each case, the sensitivities are 7.62 mV/g/V and 17.23 mV/g/V, respectively. It is confirmed that the contact resistance remained nearly constant after 14.4 million cycles of operation under 400 Hz sinusoidal acceleration with the magnitude of -10 g ∼ +10 g.",
author = "Lee, {Jae Ik} and Youngkee Eun and Jung, {Han Il} and Jungwook Choi and Jongbaeg Kim",
year = "2011",
month = "4",
day = "13",
doi = "10.1109/MEMSYS.2011.5734479",
language = "English",
isbn = "9781424496327",
pages = "533--536",
booktitle = "2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011",

}

Lee, JI, Eun, Y, Jung, HI, Choi, J & Kim, J 2011, A novel accelerometer based on contact resistance of integrated carbon nanotubes. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011., 5734479, pp. 533-536, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 11/1/23. https://doi.org/10.1109/MEMSYS.2011.5734479

A novel accelerometer based on contact resistance of integrated carbon nanotubes. / Lee, Jae Ik; Eun, Youngkee; Jung, Han Il; Choi, Jungwook; Kim, Jongbaeg.

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 533-536 5734479.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - A novel accelerometer based on contact resistance of integrated carbon nanotubes

AU - Lee, Jae Ik

AU - Eun, Youngkee

AU - Jung, Han Il

AU - Choi, Jungwook

AU - Kim, Jongbaeg

PY - 2011/4/13

Y1 - 2011/4/13

N2 - A novel accelerometer based on electrical contact resistance change between two sets of carbon nanotubes (CNTs) is presented. After the micro structures are fabricated by silicon bulk micromachining, the CNTs are synthesized from each of the facing surfaces of proof-mass and fixed electrode. When the motion of the proof-mass is generated from incoming acceleration, effective contact area between two sets of CNT bundles changes, resulting in a change of electrical contact resistance. This CNTs-based accelerometer achieves both high sensitivity and wide bandwidth. Two different sensing modes are experimentally verified and compared: the approach mode where the incoming acceleration pushes the proof-mass to the fixed electrode and the separation mode where the acceleration pulls away the proof-mass from the fixed electrode. In each case, the sensitivities are 7.62 mV/g/V and 17.23 mV/g/V, respectively. It is confirmed that the contact resistance remained nearly constant after 14.4 million cycles of operation under 400 Hz sinusoidal acceleration with the magnitude of -10 g ∼ +10 g.

AB - A novel accelerometer based on electrical contact resistance change between two sets of carbon nanotubes (CNTs) is presented. After the micro structures are fabricated by silicon bulk micromachining, the CNTs are synthesized from each of the facing surfaces of proof-mass and fixed electrode. When the motion of the proof-mass is generated from incoming acceleration, effective contact area between two sets of CNT bundles changes, resulting in a change of electrical contact resistance. This CNTs-based accelerometer achieves both high sensitivity and wide bandwidth. Two different sensing modes are experimentally verified and compared: the approach mode where the incoming acceleration pushes the proof-mass to the fixed electrode and the separation mode where the acceleration pulls away the proof-mass from the fixed electrode. In each case, the sensitivities are 7.62 mV/g/V and 17.23 mV/g/V, respectively. It is confirmed that the contact resistance remained nearly constant after 14.4 million cycles of operation under 400 Hz sinusoidal acceleration with the magnitude of -10 g ∼ +10 g.

UR - http://www.scopus.com/inward/record.url?scp=79953770318&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79953770318&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2011.5734479

DO - 10.1109/MEMSYS.2011.5734479

M3 - Conference contribution

SN - 9781424496327

SP - 533

EP - 536

BT - 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011

ER -

Lee JI, Eun Y, Jung HI, Choi J, Kim J. A novel accelerometer based on contact resistance of integrated carbon nanotubes. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 533-536. 5734479 https://doi.org/10.1109/MEMSYS.2011.5734479