A novel accelerometer based on contact resistance of integrated carbon nanotubes

Jae Ik Lee, Youngkee Eun, Han Il Jung, Jungwook Choi, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

A novel accelerometer based on electrical contact resistance change between two sets of carbon nanotubes (CNTs) is presented. After the micro structures are fabricated by silicon bulk micromachining, the CNTs are synthesized from each of the facing surfaces of proof-mass and fixed electrode. When the motion of the proof-mass is generated from incoming acceleration, effective contact area between two sets of CNT bundles changes, resulting in a change of electrical contact resistance. This CNTs-based accelerometer achieves both high sensitivity and wide bandwidth. Two different sensing modes are experimentally verified and compared: the approach mode where the incoming acceleration pushes the proof-mass to the fixed electrode and the separation mode where the acceleration pulls away the proof-mass from the fixed electrode. In each case, the sensitivities are 7.62 mV/g/V and 17.23 mV/g/V, respectively. It is confirmed that the contact resistance remained nearly constant after 14.4 million cycles of operation under 400 Hz sinusoidal acceleration with the magnitude of -10 g ∼ +10 g.

Original languageEnglish
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages533-536
Number of pages4
DOIs
Publication statusPublished - 2011 Apr 13
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 2011 Jan 232011 Jan 27

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period11/1/2311/1/27

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Lee, J. I., Eun, Y., Jung, H. I., Choi, J., & Kim, J. (2011). A novel accelerometer based on contact resistance of integrated carbon nanotubes. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 533-536). [5734479] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734479