A novel synthetic process of polyimide/poly(methyl silsesquioxane) hybrid materials with nano/micro pore structures

Kyung Il Kim, Joon Hyun An, Jun Young Lee, Jung-Hyun Kim

Research output: Contribution to journalArticle

Abstract

A novel synthetic process for multi-porous polyimide (PI)/poly (methyl silsesquioxane) (PMSSQ) hybrid material has been studied via supercritical CO2 technology. The end groups of PI precursors were modified by coupling agent to be hybridized with alkoxysitanes and became PMSSQ precursors. PI/PMSSQ hybrid precursor solution was spun on a silicon wafer substrate for film formation. The PI precursor segment was imidized and micro-pores were developed by removal of by-product, CO2 via supercritical CO 2 media. The PMSSQ precursor segment was cured and nano-pores were generated by supercritical extraction. Average micro-pore size and nano-pore size were 10μm and 40nm respectively. The dielectric constant of the multi-porous PI/PMSSQ hybrid film was calculated to 2.5.

Original languageEnglish
Pages (from-to)25-34
Number of pages10
JournalMolecular Crystals and Liquid Crystals
Volume424
DOIs
Publication statusPublished - 2004 Dec 1

Fingerprint

Hybrid materials
Pore structure
polyimides
Polyimides
porosity
Pore size
Coupling agents
Carbon Monoxide
Silicon wafers
Byproducts
Permittivity
wafers
permittivity
silicon
Substrates

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

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abstract = "A novel synthetic process for multi-porous polyimide (PI)/poly (methyl silsesquioxane) (PMSSQ) hybrid material has been studied via supercritical CO2 technology. The end groups of PI precursors were modified by coupling agent to be hybridized with alkoxysitanes and became PMSSQ precursors. PI/PMSSQ hybrid precursor solution was spun on a silicon wafer substrate for film formation. The PI precursor segment was imidized and micro-pores were developed by removal of by-product, CO2 via supercritical CO 2 media. The PMSSQ precursor segment was cured and nano-pores were generated by supercritical extraction. Average micro-pore size and nano-pore size were 10μm and 40nm respectively. The dielectric constant of the multi-porous PI/PMSSQ hybrid film was calculated to 2.5.",
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A novel synthetic process of polyimide/poly(methyl silsesquioxane) hybrid materials with nano/micro pore structures. / Kim, Kyung Il; An, Joon Hyun; Lee, Jun Young; Kim, Jung-Hyun.

In: Molecular Crystals and Liquid Crystals, Vol. 424, 01.12.2004, p. 25-34.

Research output: Contribution to journalArticle

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