A novel synthetic process for multi-porous polyimide (PI)/poly (methyl silsesquioxane) (PMSSQ) hybrid material has been studied via supercritical CO2 technology. The end groups of PI precursors were modified by coupling agent to be hybridized with alkoxysitanes and became PMSSQ precursors. PI/PMSSQ hybrid precursor solution was spun on a silicon wafer substrate for film formation. The PI precursor segment was imidized and micro-pores were developed by removal of by-product, CO2 via supercritical CO 2 media. The PMSSQ precursor segment was cured and nano-pores were generated by supercritical extraction. Average micro-pore size and nano-pore size were 10μm and 40nm respectively. The dielectric constant of the multi-porous PI/PMSSQ hybrid film was calculated to 2.5.
Bibliographical noteFunding Information:
Received 1 October 2003; Accepted 12 March 2004. This research was supported financially by the Korea Institute of Science and Technology Evaluation and Planning (National Research Laboratory Program, no. M1-9911-00-0044) and funded in part by the Ministry of Education through the Brain Korea 21 Program. Address correspondence to Jung-Hyun Kim, Dept. of Chemical Engineering, Yonsei University 134 Shinchon-dong, Seodaemun-Ku, Seoul 120-749, Korea. Tel.: 82-2-2123-4162, Fax: 82-2-312-0305, E-mail: email@example.com
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics