A shunt-type RF MEMS switch at 3.3V operation actauted by Lorentz force and electrostatic hold

Il Joo Cho, Taeksang Song, Sang Hyun Baek, Euisik Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper, we have proposed and fabricated a new shunt-type RF MEMS switch actuated by combination of Lorentz force and electrostatic hold for low power consumption and low voltage operation. There is no static power consumption because it only consumes power when changing state. The proposed switch can be operated with large actuation force and it can enhance power handling capability and mechanical stability. The fabricated switch actuated with an applied current of 49mA and the actuation voltage is 3.3V. Also, the power consumption is 87.9μJ per switching.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages1051-1054
Number of pages4
Publication statusPublished - 2005 Nov 9
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume1

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

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All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Cho, I. J., Song, T., Baek, S. H., & Yoon, E. (2005). A shunt-type RF MEMS switch at 3.3V operation actauted by Lorentz force and electrostatic hold. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1051-1054). [2E4.149] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1).