Abstract
In this paper, we have proposed and fabricated a new shunt-type RF MEMS switch actuated by combination of Lorentz force and electrostatic hold for low power consumption and low voltage operation. There is no static power consumption because it only consumes power when changing state. The proposed switch can be operated with large actuation force and it can enhance power handling capability and mechanical stability. The fabricated switch actuated with an applied current of 49mA and the actuation voltage is 3.3V. Also, the power consumption is 87.9μJ per switching.
| Original language | English |
|---|---|
| Title of host publication | TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers |
| Pages | 1051-1054 |
| Number of pages | 4 |
| Publication status | Published - 2005 Nov 9 |
| Event | 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 2005 Jun 5 → 2005 Jun 9 |
Publication series
| Name | Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 |
|---|---|
| Volume | 1 |
Other
| Other | 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 |
|---|---|
| Country | Korea, Republic of |
| City | Seoul |
| Period | 05/6/5 → 05/6/9 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
Cite this
Cho, I. J., Song, T., Baek, S. H., & Yoon, E. (2005). A shunt-type RF MEMS switch at 3.3V operation actauted by Lorentz force and electrostatic hold. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1051-1054). [2E4.149] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1).