A study of the electrical properties of graphene-incorporated direct-patternable ZnO thin films

Hyuncheol Kim, Jong Tae Baek, Hyung-Ho Park

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

A direct-patternable ZnO thin film was prepared by photochemical solution deposition and the electrical properties were improved by the incorporation of graphene. The transmittance of graphene-incorporated ZnO thin films was similar to that of ZnO thin film due to the incorporation of graphene, which slightly decreased the crystallinity of the ZnO thin films. In addition, the resistivity was improved due to the enhanced mobility due to the π-bond nature of the graphene surface. Graphene-incorporated ZnO thin film was direct-patterned through photochemical solution deposition without a photoresist or conventional dry etching process. These results suggest that a micro-patterned system can be simply fabricated at low cost, and the electrical properties of ZnO thin films can be improved by incorporating graphene.

Original languageEnglish
Pages (from-to)234-237
Number of pages4
JournalThin Solid Films
Volume529
DOIs
Publication statusPublished - 2013 Feb 1

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Graphene
graphene
Electric properties
electrical properties
Thin films
thin films
Dry etching
Photoresists
photoresists
crystallinity
transmittance
etching
electrical resistivity
Costs

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

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abstract = "A direct-patternable ZnO thin film was prepared by photochemical solution deposition and the electrical properties were improved by the incorporation of graphene. The transmittance of graphene-incorporated ZnO thin films was similar to that of ZnO thin film due to the incorporation of graphene, which slightly decreased the crystallinity of the ZnO thin films. In addition, the resistivity was improved due to the enhanced mobility due to the π-bond nature of the graphene surface. Graphene-incorporated ZnO thin film was direct-patterned through photochemical solution deposition without a photoresist or conventional dry etching process. These results suggest that a micro-patterned system can be simply fabricated at low cost, and the electrical properties of ZnO thin films can be improved by incorporating graphene.",
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A study of the electrical properties of graphene-incorporated direct-patternable ZnO thin films. / Kim, Hyuncheol; Baek, Jong Tae; Park, Hyung-Ho.

In: Thin Solid Films, Vol. 529, 01.02.2013, p. 234-237.

Research output: Contribution to journalArticle

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