A study of the incorporation of conducting materials into direct-patternable SnO2 thin films formed by photochemical metal-organic deposition

Hyuncheol Kim, Su Cheol Gong, Ho Jung Chang, Hyeongtag Jeon, Hyung-Ho Park

Research output: Contribution to journalArticle

Abstract

Ag nanoparticles and multi-wall carbon nanotubes (MWNTs) were incorporated into a SnO2 photosensitive precursor solution, and a direct-patternable film was prepared by photochemical metal-organic deposition. SnO2 film transmittance and crystallinity were slightly reduced by light absorption of Ag nanoparticles and light scattering by MWNTs. In the case of mixed incorporation of Ag nanoparticles and MWNTs, the sheet resistance of SnO2 hybrid films was decreased relative to incorporation of either single material. Direct-patterning of SnO2 hybrid films was performed without photoresist or dry etching. These results suggest that a micro-patterned system can be simply fabricated at a low cost, and the electrical properties of SnO2 films can be improved by incorporating Ag nanoparticles with MWNTs.

Original languageEnglish
Pages (from-to)1009-1012
Number of pages4
JournalJournal of the Ceramic Society of Japan
Volume118
Issue number1383
DOIs
Publication statusPublished - 2010 Jan 1

Fingerprint

Carbon Nanotubes
Metals
Carbon nanotubes
conduction
Thin films
carbon nanotubes
Nanoparticles
thin films
nanoparticles
metals
Dry etching
Sheet resistance
Photoresists
electromagnetic absorption
photoresists
Light scattering
Light absorption
crystallinity
transmittance
Electric properties

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

Cite this

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abstract = "Ag nanoparticles and multi-wall carbon nanotubes (MWNTs) were incorporated into a SnO2 photosensitive precursor solution, and a direct-patternable film was prepared by photochemical metal-organic deposition. SnO2 film transmittance and crystallinity were slightly reduced by light absorption of Ag nanoparticles and light scattering by MWNTs. In the case of mixed incorporation of Ag nanoparticles and MWNTs, the sheet resistance of SnO2 hybrid films was decreased relative to incorporation of either single material. Direct-patterning of SnO2 hybrid films was performed without photoresist or dry etching. These results suggest that a micro-patterned system can be simply fabricated at a low cost, and the electrical properties of SnO2 films can be improved by incorporating Ag nanoparticles with MWNTs.",
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A study of the incorporation of conducting materials into direct-patternable SnO2 thin films formed by photochemical metal-organic deposition. / Kim, Hyuncheol; Gong, Su Cheol; Chang, Ho Jung; Jeon, Hyeongtag; Park, Hyung-Ho.

In: Journal of the Ceramic Society of Japan, Vol. 118, No. 1383, 01.01.2010, p. 1009-1012.

Research output: Contribution to journalArticle

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AU - Park, Hyung-Ho

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AB - Ag nanoparticles and multi-wall carbon nanotubes (MWNTs) were incorporated into a SnO2 photosensitive precursor solution, and a direct-patternable film was prepared by photochemical metal-organic deposition. SnO2 film transmittance and crystallinity were slightly reduced by light absorption of Ag nanoparticles and light scattering by MWNTs. In the case of mixed incorporation of Ag nanoparticles and MWNTs, the sheet resistance of SnO2 hybrid films was decreased relative to incorporation of either single material. Direct-patterning of SnO2 hybrid films was performed without photoresist or dry etching. These results suggest that a micro-patterned system can be simply fabricated at a low cost, and the electrical properties of SnO2 films can be improved by incorporating Ag nanoparticles with MWNTs.

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