Abstract
We report on the realization of solid immersion lens (SIL)-based near-field (NF) optics with an annular aperture, which is targeted to achieve high optical resolution. A numerical aperture (NA) = 1.84 hemisphere SILoptics with an annular aperture achieves higher optical resolution than the conventional NA = 2.0 SIL-optics. The designed aperture is fabricated by photo-lithography and dry-etching technique. Experimental verification of the designed optics was performed through beam spot profile measurement under NF imaging conditions. A 15% smaller full-width-at-half-maximum spot diameter is obtained by the aperture. We verified that this method gives an improvement of the resolution in the optical imaging systems requiring higher resolution.
| Original language | English |
|---|---|
| Pages (from-to) | 17533-17541 |
| Number of pages | 9 |
| Journal | Optics Express |
| Volume | 18 |
| Issue number | 16 |
| DOIs | |
| Publication status | Published - 2010 Aug 2 |
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All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
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A study on the realization of high resolution solid immersion lens-based near-field imaging optics by use of an annular aperture. / Moon, Hyungbae; Yoon, Yong Joong; Kim, Wan Chin; Park, No Cheol; Park, Kyoung Su; Park, Young Pil.
In: Optics Express, Vol. 18, No. 16, 02.08.2010, p. 17533-17541.Research output: Contribution to journal › Article
TY - JOUR
T1 - A study on the realization of high resolution solid immersion lens-based near-field imaging optics by use of an annular aperture
AU - Moon, Hyungbae
AU - Yoon, Yong Joong
AU - Kim, Wan Chin
AU - Park, No Cheol
AU - Park, Kyoung Su
AU - Park, Young Pil
PY - 2010/8/2
Y1 - 2010/8/2
N2 - We report on the realization of solid immersion lens (SIL)-based near-field (NF) optics with an annular aperture, which is targeted to achieve high optical resolution. A numerical aperture (NA) = 1.84 hemisphere SILoptics with an annular aperture achieves higher optical resolution than the conventional NA = 2.0 SIL-optics. The designed aperture is fabricated by photo-lithography and dry-etching technique. Experimental verification of the designed optics was performed through beam spot profile measurement under NF imaging conditions. A 15% smaller full-width-at-half-maximum spot diameter is obtained by the aperture. We verified that this method gives an improvement of the resolution in the optical imaging systems requiring higher resolution.
AB - We report on the realization of solid immersion lens (SIL)-based near-field (NF) optics with an annular aperture, which is targeted to achieve high optical resolution. A numerical aperture (NA) = 1.84 hemisphere SILoptics with an annular aperture achieves higher optical resolution than the conventional NA = 2.0 SIL-optics. The designed aperture is fabricated by photo-lithography and dry-etching technique. Experimental verification of the designed optics was performed through beam spot profile measurement under NF imaging conditions. A 15% smaller full-width-at-half-maximum spot diameter is obtained by the aperture. We verified that this method gives an improvement of the resolution in the optical imaging systems requiring higher resolution.
UR - http://www.scopus.com/inward/record.url?scp=77955649314&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77955649314&partnerID=8YFLogxK
U2 - 10.1364/OE.18.017533
DO - 10.1364/OE.18.017533
M3 - Article
C2 - 20721138
AN - SCOPUS:77955649314
VL - 18
SP - 17533
EP - 17541
JO - Optics Express
JF - Optics Express
SN - 1094-4087
IS - 16
ER -