A study on the realization of high resolution solid immersion lens-based near-field imaging optics by use of an annular aperture

Hyungbae Moon; Yong Joong Yoon; Wan Chin Kim; No Cheol Park; Kyoung Su Park; Young Pil Park

doi:10.1364/OE.18.017533

A study on the realization of high resolution solid immersion lens-based near-field imaging optics by use of an annular aperture

Hyungbae Moon, Yong Joong Yoon, Wan Chin Kim, No Cheol Park, Kyoung Su Park, Young Pil Park

Department of Mechanical Engineering

Research output: Contribution to journal › Article

3 Citations (Scopus)

Abstract

We report on the realization of solid immersion lens (SIL)-based near-field (NF) optics with an annular aperture, which is targeted to achieve high optical resolution. A numerical aperture (NA) = 1.84 hemisphere SILoptics with an annular aperture achieves higher optical resolution than the conventional NA = 2.0 SIL-optics. The designed aperture is fabricated by photo-lithography and dry-etching technique. Experimental verification of the designed optics was performed through beam spot profile measurement under NF imaging conditions. A 15% smaller full-width-at-half-maximum spot diameter is obtained by the aperture. We verified that this method gives an improvement of the resolution in the optical imaging systems requiring higher resolution.

Original language	English
Pages (from-to)	17533-17541
Number of pages	9
Journal	Optics Express
Volume	18
Issue number	16
DOIs	https://doi.org/10.1364/OE.18.017533
Publication status	Published - 2010 Aug 2

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics

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10.1364/OE.18.017533

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Moon, H., Yoon, Y. J., Kim, W. C., Park, N. C., Park, K. S., & Park, Y. P. (2010). A study on the realization of high resolution solid immersion lens-based near-field imaging optics by use of an annular aperture. Optics Express, 18(16), 17533-17541. https://doi.org/10.1364/OE.18.017533

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abstract = "We report on the realization of solid immersion lens (SIL)-based near-field (NF) optics with an annular aperture, which is targeted to achieve high optical resolution. A numerical aperture (NA) = 1.84 hemisphere SILoptics with an annular aperture achieves higher optical resolution than the conventional NA = 2.0 SIL-optics. The designed aperture is fabricated by photo-lithography and dry-etching technique. Experimental verification of the designed optics was performed through beam spot profile measurement under NF imaging conditions. A 15% smaller full-width-at-half-maximum spot diameter is obtained by the aperture. We verified that this method gives an improvement of the resolution in the optical imaging systems requiring higher resolution.",

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