A study on the realization of high resolution solid immersion lens-based near-field imaging optics by use of an annular aperture

Hyungbae Moon, Yong Joong Yoon, Wan Chin Kim, No Cheol Park, Kyoung Su Park, Young Pil Park

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

We report on the realization of solid immersion lens (SIL)-based near-field (NF) optics with an annular aperture, which is targeted to achieve high optical resolution. A numerical aperture (NA) = 1.84 hemisphere SILoptics with an annular aperture achieves higher optical resolution than the conventional NA = 2.0 SIL-optics. The designed aperture is fabricated by photo-lithography and dry-etching technique. Experimental verification of the designed optics was performed through beam spot profile measurement under NF imaging conditions. A 15% smaller full-width-at-half-maximum spot diameter is obtained by the aperture. We verified that this method gives an improvement of the resolution in the optical imaging systems requiring higher resolution.

Original languageEnglish
Pages (from-to)17533-17541
Number of pages9
JournalOptics Express
Volume18
Issue number16
DOIs
Publication statusPublished - 2010 Aug 2

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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