A thermoelectric gas sensor based on an embedded tin oxide catalyst for detecting hydrogen and NOx gases

Seung Il Yoon, Chung Il Lee, Yong Jun Kim

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

This paper reports a novel gas sensing method by using a thermoelectric device, thermopile in this case, with an embedded tin oxide catalyst. By using a thin catalyst film and gas adsorption process instead of absorption, the response time and recovery time were remarkably improved. And the fabricated sensor was characterized through detecting a hydrogen gas. Finally, NO x gas was successfully detected by using the proposed sensor. The respond and recovery time were shorter than 1 minute. The output signal change according to the concentrations of the NOx gas was 1.5 x 10 1 μ V/ppm.

Original languageEnglish
Article number4805371
Pages (from-to)272-275
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs
Publication statusPublished - 2009 Jun 1
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 2009 Jan 252009 Jan 29

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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