Abstract
This paper reports a novel gas sensing method by using a thermoelectric device, thermopile in this case, with an embedded tin oxide catalyst. By using a thin catalyst film and gas adsorption process instead of absorption, the response time and recovery time were remarkably improved. And the fabricated sensor was characterized through detecting a hydrogen gas. Finally, NO x gas was successfully detected by using the proposed sensor. The respond and recovery time were shorter than 1 minute. The output signal change according to the concentrations of the NOx gas was 1.5 x 10 1 μ V/ppm.
Original language | English |
---|---|
Article number | 4805371 |
Pages (from-to) | 272-275 |
Number of pages | 4 |
Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
DOIs | |
Publication status | Published - 2009 |
Event | 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering