Abstract
In this paper, we have proposed and demonstrated a widely tunable optical filter using magnetic actuation. We have fabricated and tested three types of spring structures: straight bar, corrugation, and meander types. We have achieved linear displacement over 1μm due to bi-directional nature of magnetic actuation. From this, we have acquired a wide linear tuning range over 200nm in wavelength which is the widest ever reported. The fabricated tunable filter consumes a maximum static power less than 25μW with an external magnetic field of 0.28T.
| Original language | English |
|---|---|
| Pages (from-to) | 93-96 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Publication status | Published - 2004 |
| Event | 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands Duration: 2004 Jan 25 → 2004 Jan 29 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering