Accurate characterization of mem inductors on lossy silicon

Young Ho Lee, Sang No Lee, Jong Gwan Yook, Ji Hyuk Kim, Kuk Jin Chun

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

This paper presents the performance characteristics of an air-suspended high-Q MEM inductor that is characterized based on an open-short deembedding scheme and used for accurate and reliable evaluation of the parasitic effects experienced from feed lines as well as contact pads. The validity and effectiveness of the de-embedding method are proven with a fixed-length MEM transmission line along with various feed-line topologies. The measured inductances of the 20-μm elevated transmission line provide consistent data, as compared to the simpler open de-embedding method. For more realistic and complicated MEM inductors with 1.5 and 2.5 turns, the characterized inductance values agree very well with the calculated data, based on the Greenhouse algorithm. The measured and calculated inductances are within the 5% range.

Original languageEnglish
Pages (from-to)355-358
Number of pages4
JournalMicrowave and Optical Technology Letters
Volume43
Issue number4
DOIs
Publication statusPublished - 2004 Nov 20

Fingerprint

Mars Excursion Module
Silicon
inductors
inductance
Inductance
embedding
transmission lines
Electric lines
silicon
greenhouses
Greenhouses
Q factors
topology
Topology
evaluation
air
Air

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Lee, Young Ho ; Lee, Sang No ; Yook, Jong Gwan ; Kim, Ji Hyuk ; Chun, Kuk Jin. / Accurate characterization of mem inductors on lossy silicon. In: Microwave and Optical Technology Letters. 2004 ; Vol. 43, No. 4. pp. 355-358.
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Accurate characterization of mem inductors on lossy silicon. / Lee, Young Ho; Lee, Sang No; Yook, Jong Gwan; Kim, Ji Hyuk; Chun, Kuk Jin.

In: Microwave and Optical Technology Letters, Vol. 43, No. 4, 20.11.2004, p. 355-358.

Research output: Contribution to journalArticle

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