Addition of surfactants in ozonated water cleaning for the suppression of functional group formation and particle adhesion on the SiO 2 surface

Jahyun Yang, Kyungtaek Im, Sangwoo Lim

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Various kinds of surfactants were added to a cleaning solution and deionized (DI) water, and their effect on the suppression of organic function group formation and particle adhesion to a SiO 2 surface was analyzed using multi-internal reflection Fourier transform infrared spectroscopy. The results implied that attached organic functional groups are affected by the chemical structure of a surfactant in DI water. Furthermore, the addition of anionic glycolic acid ethoxylate 4-tert-butylphenyl ether (GAE4E) is the most effective in terms of preventing organic group attachment and particle adhesion to the SiO 2 surface, whether it was added to the cleaning solution or post-cleaning rinse water, with or without polystyrene latex particles. Moreover, it was possible to completely prevent particle adhesion to the SiO 2 surface with the proper addition of GAE4E in DIO 3 solution.

Original languageEnglish
Pages (from-to)5476-5479
Number of pages4
JournalApplied Surface Science
Volume257
Issue number13
DOIs
Publication statusPublished - 2011 Apr 15

Bibliographical note

Funding Information:
This work was financially supported by Hynix Semiconductor Inc. This work was also supported by Priority Research Centers Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology ( 2009-0093823 ).

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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