Addition of surfactants in ozonated water cleaning for the suppression of functional group formation and particle adhesion on the SiO 2 surface

Jahyun Yang, Kyungtaek Im, Sangwoo Lim

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Various kinds of surfactants were added to a cleaning solution and deionized (DI) water, and their effect on the suppression of organic function group formation and particle adhesion to a SiO 2 surface was analyzed using multi-internal reflection Fourier transform infrared spectroscopy. The results implied that attached organic functional groups are affected by the chemical structure of a surfactant in DI water. Furthermore, the addition of anionic glycolic acid ethoxylate 4-tert-butylphenyl ether (GAE4E) is the most effective in terms of preventing organic group attachment and particle adhesion to the SiO 2 surface, whether it was added to the cleaning solution or post-cleaning rinse water, with or without polystyrene latex particles. Moreover, it was possible to completely prevent particle adhesion to the SiO 2 surface with the proper addition of GAE4E in DIO 3 solution.

Original languageEnglish
Pages (from-to)5476-5479
Number of pages4
JournalApplied Surface Science
Volume257
Issue number13
DOIs
Publication statusPublished - 2011 Apr 15

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glycolic acid
Surface-Active Agents
Functional groups
Cleaning
Surface active agents
Adhesion
Deionized water
Ether
Water
Ethers
Acids
Latexes
Particles (particulate matter)
Fourier transform infrared spectroscopy
Polystyrenes

All Science Journal Classification (ASJC) codes

  • Surfaces, Coatings and Films

Cite this

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Addition of surfactants in ozonated water cleaning for the suppression of functional group formation and particle adhesion on the SiO 2 surface . / Yang, Jahyun; Im, Kyungtaek; Lim, Sangwoo.

In: Applied Surface Science, Vol. 257, No. 13, 15.04.2011, p. 5476-5479.

Research output: Contribution to journalArticle

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