Addition of surfactants in ozonated water cleaning for the suppression of functional group formation and particle adhesion on the SiO                         2                          surface

Jahyun Yang; Kyungtaek Im; Sangwoo Lim

doi:10.1016/j.apsusc.2010.11.004

Addition of surfactants in ozonated water cleaning for the suppression of functional group formation and particle adhesion on the SiO ₂ surface

Jahyun Yang, Kyungtaek Im, Sangwoo Lim

Department of Chemical and Biomolecular Engineering

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Various kinds of surfactants were added to a cleaning solution and deionized (DI) water, and their effect on the suppression of organic function group formation and particle adhesion to a SiO ₂ surface was analyzed using multi-internal reflection Fourier transform infrared spectroscopy. The results implied that attached organic functional groups are affected by the chemical structure of a surfactant in DI water. Furthermore, the addition of anionic glycolic acid ethoxylate 4-tert-butylphenyl ether (GAE4E) is the most effective in terms of preventing organic group attachment and particle adhesion to the SiO ₂ surface, whether it was added to the cleaning solution or post-cleaning rinse water, with or without polystyrene latex particles. Moreover, it was possible to completely prevent particle adhesion to the SiO ₂ surface with the proper addition of GAE4E in DIO ₃ solution.

Original language	English
Pages (from-to)	5476-5479
Number of pages	4
Journal	Applied Surface Science
Volume	257
Issue number	13
DOIs	https://doi.org/10.1016/j.apsusc.2010.11.004
Publication status	Published - 2011 Apr 15

Bibliographical note

Funding Information:
This work was financially supported by Hynix Semiconductor Inc. This work was also supported by Priority Research Centers Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology ( 2009-0093823 ).

All Science Journal Classification (ASJC) codes

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1016/j.apsusc.2010.11.004

Cite this

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title = " Addition of surfactants in ozonated water cleaning for the suppression of functional group formation and particle adhesion on the SiO 2 surface ",

abstract = " Various kinds of surfactants were added to a cleaning solution and deionized (DI) water, and their effect on the suppression of organic function group formation and particle adhesion to a SiO 2 surface was analyzed using multi-internal reflection Fourier transform infrared spectroscopy. The results implied that attached organic functional groups are affected by the chemical structure of a surfactant in DI water. Furthermore, the addition of anionic glycolic acid ethoxylate 4-tert-butylphenyl ether (GAE4E) is the most effective in terms of preventing organic group attachment and particle adhesion to the SiO 2 surface, whether it was added to the cleaning solution or post-cleaning rinse water, with or without polystyrene latex particles. Moreover, it was possible to completely prevent particle adhesion to the SiO 2 surface with the proper addition of GAE4E in DIO 3 solution.",

author = "Jahyun Yang and Kyungtaek Im and Sangwoo Lim",

note = "Funding Information: This work was financially supported by Hynix Semiconductor Inc. This work was also supported by Priority Research Centers Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology ( 2009-0093823 ).",

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Yang, J, Im, K & Lim, S 2011, ' Addition of surfactants in ozonated water cleaning for the suppression of functional group formation and particle adhesion on the SiO ₂ surface ', Applied Surface Science, vol. 257, no. 13, pp. 5476-5479. https://doi.org/10.1016/j.apsusc.2010.11.004

Addition of surfactants in ozonated water cleaning for the suppression of functional group formation and particle adhesion on the SiO ₂ surface . / Yang, Jahyun; Im, Kyungtaek; Lim, Sangwoo.

In: Applied Surface Science, Vol. 257, No. 13, 15.04.2011, p. 5476-5479.

Research output: Contribution to journal › Article › peer-review

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