Abstract
Neuromorphic systems require integrated structures with high-density memory and selector devices to avoid interference and recognition errors between neighboring memory cells. To improve the performance of a selector device, it is important to understand the characteristics of the switching process. As changes by switching cycle occur at local nanoscale areas, a high-resolution analysis method is needed to investigate this phenomenon. Atomic force microscopy (AFM) is used to analyze the local changes because it offers nanoscale detection with high-resolution capabilities. This review introduces various types of AFM such as conductive AFM (C-AFM), electrostatic force microscopy (EFM), and Kelvin probe force microscopy (KPFM) to study switching behaviors.
Original language | English |
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Article number | 7 |
Journal | Applied Microscopy |
Volume | 51 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2021 Dec |
Bibliographical note
Funding Information:This research was supported by the Ministry of Trade and Industry, the Energy/Korea Evaluation Institute of Industrial Technology (MOTIE/KEIT, project number 10080625), the Korea Semiconductor Research Consortium (KSRC) program for the development of future semiconductor devices, and Samsung Electronics. This study was also supported under the framework of the Center for Social Engagement program managed by the Institute of Convergence Science, Yonsei University.
Publisher Copyright:
© 2021, The Author(s).
All Science Journal Classification (ASJC) codes
- Microbiology
- Applied Microbiology and Biotechnology