Advanced permeation properties of solvent-free multi-layer encapsulation of thin films on Ethylene Terephthalate(PET)

Jin Woo Han, Hee Jin Kang, Jong Yeon Kim, Jong Hwan Kim, Jung Min Han, Hyun Chan Moon, Kwang Bum Park, Hwi Woon Kim, Dae Shik Seo

Research output: Contribution to journalConference article


In this paper, the inorganic multi-layer encapsulation of thin film was newly adopted to protect the organic layer from moisture and oxygen. Using the electron beam, Sputter, inorganic multi-layer thin-film encapsulation was deposited onto the Ethylene Terephthalate(PET) and their interface properties between inorganic and organic layer were investigated. In this investigation, the SiON SiO2 and parylene layer showed the most suitable properties. Under these conditions, the water vapor transmission rate (WVTR) for PET can be reduced from level of 0.57 g/m2/day (bare substrate) to 1*10-5 g/m2/day after application of a SiON and SiO2 layer. These results indicate that the PET/SiO 2/SiON/Parylene barrier coatings have high potential for flexible organic light-emitting diode(OLED) applications.

Original languageEnglish
Pages (from-to)973-976
Number of pages4
JournalProceedings of International Meeting on Information Display
Publication statusPublished - 2006 Dec 1
EventIMID/IDMC 2006: 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference - Daegu, Korea, Republic of
Duration: 2006 Aug 222006 Aug 25


All Science Journal Classification (ASJC) codes

  • Engineering(all)

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