Advanced thick film system for AlN substrates

Y. L. Wang, A. F. Carroll, J. D. Smith, Y. Cho, R. J. Bacher, D. K. Anderson, J. C. Crumpton, C. R.S. Needes

Research output: Contribution to journalConference article

Abstract

Substrates with high thermal conductivity continue to be in great demand for their ability to enable smaller and denser high power circuits. BeO has been used for this purpose for many years with thick film materials. However, due to health and environmental concerns with BeO, many manufacturers feel compelled to switch to alternative substrates. This paper will discuss a thick film system consisting of conductors, dielectric, and resistors developed specifically for use with the most likely alternative, AlN substrates. This system will soon find broad use in applications such as power resistors for telecom, optoelectronic submounts, and high-power automotive applications.

Original languageEnglish
Pages (from-to)566-570
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4931
Publication statusPublished - 2002 Jan 1
Event2002 International Symposium on Microelectronics - Denver, CO, United States
Duration: 2002 Sep 42002 Sep 6

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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    Wang, Y. L., Carroll, A. F., Smith, J. D., Cho, Y., Bacher, R. J., Anderson, D. K., Crumpton, J. C., & Needes, C. R. S. (2002). Advanced thick film system for AlN substrates. Proceedings of SPIE - The International Society for Optical Engineering, 4931, 566-570.