Advanced thick film system for AlN substrates

Y. L. Wang, A. F. Carroll, J. D. Smith, Yong Soo Cho, R. J. Bacher, D. K. Anderson, J. C. Crumpton, C. R.S. Needes

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Abstract

Substrates with high thermal conductivity continue to be in great demand for their ability to enable smaller and denser high power circuits. BeO has been used for this purpose for many years with thick film materials. However, due to health and environmental concerns with BeO, many manufacturers feel compelled to switch to alternative substrates. This paper will discuss a thick film system consisting of conductors, dielectric, and resistors developed specifically for use with the most likely alternative, AlN substrates. This system will soon find broad use in applications such as power resistors for telecom, optoelectronic submounts, and high-power automotive applications.

Original languageEnglish
Pages (from-to)48-51
Number of pages4
JournalMicroelectronics International
Volume20
Issue number1
DOIs
Publication statusPublished - 2003 Jan 1

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Wang, Y. L., Carroll, A. F., Smith, J. D., Cho, Y. S., Bacher, R. J., Anderson, D. K., Crumpton, J. C., & Needes, C. R. S. (2003). Advanced thick film system for AlN substrates. Microelectronics International, 20(1), 48-51. https://doi.org/10.1108/13565360310455535