Aerosol particle size spectrometer using a micromachined cascade impactor

Hong Lae Kim, Jang Seop Han, Sang Myun Lee, Hong Bum Gown, Jungho Hwang, Yong-Jun Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports a MEMS-based particle size spectrometer using a micromachined cascade impactor. While a MEMS-based particle counter presented in our previous research was developed for measuring the total number concentration of particles within certain size range, the proposed particle size spectrometer is developed for measuring airborne particle size distribution. To the best of our knowledge, MEMS device for measuring aerodynamic particle size distribution is a first attempt. The overall performance of the MEMS-based particle size spectrometer was evaluated by comparing size distribution measurements with commercial instrument.

Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages84-86
Number of pages3
ISBN (Electronic)9781509050789
DOIs
Publication statusPublished - 2017 Feb 23
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: 2017 Jan 222017 Jan 26

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
CountryUnited States
CityLas Vegas
Period17/1/2217/1/26

Fingerprint

impactors
Aerosols
microelectromechanical systems
MEMS
Spectrometers
aerosols
cascades
Particle size
spectrometers
particle size distribution
Particle size analysis
Radiation counters
radiation counters
aerodynamics
Aerodynamics

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Kim, H. L., Han, J. S., Lee, S. M., Gown, H. B., Hwang, J., & Kim, Y-J. (2017). Aerosol particle size spectrometer using a micromachined cascade impactor. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 84-86). [7863345] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863345
Kim, Hong Lae ; Han, Jang Seop ; Lee, Sang Myun ; Gown, Hong Bum ; Hwang, Jungho ; Kim, Yong-Jun. / Aerosol particle size spectrometer using a micromachined cascade impactor. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 84-86
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Kim, HL, Han, JS, Lee, SM, Gown, HB, Hwang, J & Kim, Y-J 2017, Aerosol particle size spectrometer using a micromachined cascade impactor. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863345, Institute of Electrical and Electronics Engineers Inc., pp. 84-86, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863345

Aerosol particle size spectrometer using a micromachined cascade impactor. / Kim, Hong Lae; Han, Jang Seop; Lee, Sang Myun; Gown, Hong Bum; Hwang, Jungho; Kim, Yong-Jun.

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 84-86 7863345.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - This paper reports a MEMS-based particle size spectrometer using a micromachined cascade impactor. While a MEMS-based particle counter presented in our previous research was developed for measuring the total number concentration of particles within certain size range, the proposed particle size spectrometer is developed for measuring airborne particle size distribution. To the best of our knowledge, MEMS device for measuring aerodynamic particle size distribution is a first attempt. The overall performance of the MEMS-based particle size spectrometer was evaluated by comparing size distribution measurements with commercial instrument.

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Kim HL, Han JS, Lee SM, Gown HB, Hwang J, Kim Y-J. Aerosol particle size spectrometer using a micromachined cascade impactor. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 84-86. 7863345 https://doi.org/10.1109/MEMSYS.2017.7863345