Extremely small bandpass filters with TFBARs using aluminum nitride piezoelectric material have been realized in this study. Resonator modeling has been performed based on the modified Butterworth-Van Dyke (MBVD) model from the measured frequency responses of a single resonator. The predicted filter responses are compared with measured frequency data.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering