Abstract
Extremely small bandpass filters with TFBARs using aluminum nitride piezoelectric material have been realized in this study. Resonator modeling has been performed based on the modified Butterworth-Van Dyke (MBVD) model from the measured frequency responses of a single resonator. The predicted filter responses are compared with measured frequency data.
Original language | English |
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Pages (from-to) | 386-387 |
Number of pages | 2 |
Journal | Microwave and Optical Technology Letters |
Volume | 34 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2002 Sept 5 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering