Aligned carbon nanotube arrays for degradation-resistant, intimate contact in micromechanical devices

Jungwook Choi, Jae Ik Lee, Youngkee Eun, Min Ook Kim, Jongbaeg Kim

Research output: Contribution to journalArticle

47 Citations (Scopus)

Abstract

A highly reliable micromechanical contact based on aligned carbon nanotube (CNT) arrays is demonstrated and characterized. The CNT arrays are synthesized directly on three-terminal microelectromechanical systems, and they are adjusted and simultaneously preloaded during the synthetic process, making intimate micromechanical contacts. It is found that the CNT array-to-array contact improves upon conventional solid-to-solid micromechanical contact.

Original languageEnglish
Pages (from-to)2231-2236
Number of pages6
JournalAdvanced Materials
Volume23
Issue number19
DOIs
Publication statusPublished - 2011 May 17

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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