Abstract
A highly reliable micromechanical contact based on aligned carbon nanotube (CNT) arrays is demonstrated and characterized. The CNT arrays are synthesized directly on three-terminal microelectromechanical systems, and they are adjusted and simultaneously preloaded during the synthetic process, making intimate micromechanical contacts. It is found that the CNT array-to-array contact improves upon conventional solid-to-solid micromechanical contact.
| Original language | English |
|---|---|
| Pages (from-to) | 2231-2236 |
| Number of pages | 6 |
| Journal | Advanced Materials |
| Volume | 23 |
| Issue number | 19 |
| DOIs | |
| Publication status | Published - 2011 May 17 |
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
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Choi, J., Lee, J. I., Eun, Y., Kim, M. O., & Kim, J. (2011). Aligned carbon nanotube arrays for degradation-resistant, intimate contact in micromechanical devices. Advanced Materials, 23(19), 2231-2236. https://doi.org/10.1002/adma.201100472