Aligned carbon nanotube arrays for degradation-resistant, intimate contact in micromechanical devices

Jungwook Choi; Jae Ik Lee; Youngkee Eun; Min Ook Kim; Jongbaeg Kim

doi:10.1002/adma.201100472

Aligned carbon nanotube arrays for degradation-resistant, intimate contact in micromechanical devices

Jungwook Choi, Jae Ik Lee, Youngkee Eun, Min Ook Kim, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

49 Citations (Scopus)

Abstract

A highly reliable micromechanical contact based on aligned carbon nanotube (CNT) arrays is demonstrated and characterized. The CNT arrays are synthesized directly on three-terminal microelectromechanical systems, and they are adjusted and simultaneously preloaded during the synthetic process, making intimate micromechanical contacts. It is found that the CNT array-to-array contact improves upon conventional solid-to-solid micromechanical contact.

Original language	English
Pages (from-to)	2231-2236
Number of pages	6
Journal	Advanced Materials
Volume	23
Issue number	19
DOIs	https://doi.org/10.1002/adma.201100472
Publication status	Published - 2011 May 17

All Science Journal Classification (ASJC) codes

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

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10.1002/adma.201100472

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