Abstract
A highly reliable micromechanical contact based on aligned carbon nanotube (CNT) arrays is demonstrated and characterized. The CNT arrays are synthesized directly on three-terminal microelectromechanical systems, and they are adjusted and simultaneously preloaded during the synthetic process, making intimate micromechanical contacts. It is found that the CNT array-to-array contact improves upon conventional solid-to-solid micromechanical contact.
Original language | English |
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Pages (from-to) | 2231-2236 |
Number of pages | 6 |
Journal | Advanced Materials |
Volume | 23 |
Issue number | 19 |
DOIs | |
Publication status | Published - 2011 May 17 |
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering