Alignment of the Korsch type off-axis 3 mirror optical system using sensitivity table method

The optical system of the entire mechanical and optical components consist of all silicon carbide (SiC) is designed, manufactured and aligned. The Korsch type Cassegrain optical system has 3-mirrors, the primary mirror (M1), the secondary mirror (M2), the folding mirror (FM) and the tertiary mirror (M3). To assemble the M3 and the FM to the rear side of the M1 bench, the optical axis of the M3 is 65.56 mm off from the physical center. Due to the limitation of the mass budget, the M3 is truncated excluding its optical axis. The M2 was assigned to the coma compensator and the M3 the astigmatism respectively as per the result of the sensitivity analysis. Despite of the difficulty of placing these optical components in their initial position within the mechanical tolerance, the initial wave front error (WFE) performance is as large as 171.4 nm RMS. After the initial alignment, the sensitivity table method is used to reach the goal of WFE 63.3 nm RMS in all fields. We finished the alignment with the final WFE performance in all fields are as large as 55.18 nm RMS.