Abstract
Diamond like carbon (DLC) films are known that they show homogeneous alignment property when they are irradiated by Ar ion beam. The DLC films in most of studies were deposited by CVD and contain large mount of hydrogen. In order to identity the hydrogen effect on alignment property, DLC films is deposited by RF magnetron sputter using various ratio of Ar and H2 as reactive gas. DLC films are characterized by FT-IR, Raman and contact angle. Alignment property is estimated by measuring pretilt angle.
| Original language | English |
|---|---|
| Pages (from-to) | 378-380 |
| Number of pages | 3 |
| Journal | Proceedings of International Meeting on Information Display |
| Volume | 1 |
| Publication status | Published - 2006 Dec 1 |
| Event | 5th International Meeting on Information Display - Seoul, Korea, Republic of Duration: 2005 Jul 19 → 2005 Jul 23 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
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Alignment property change in DLC alignment layer containing various hydrogen concentration. / Kim, Jong Bok; Kim, Kyung Chan; Ahn, Han Jin; Hwang, Byung Har; Baik, Hong Koo.
In: Proceedings of International Meeting on Information Display, Vol. 1, 01.12.2006, p. 378-380.Research output: Contribution to journal › Conference article
TY - JOUR
T1 - Alignment property change in DLC alignment layer containing various hydrogen concentration
AU - Kim, Jong Bok
AU - Kim, Kyung Chan
AU - Ahn, Han Jin
AU - Hwang, Byung Har
AU - Baik, Hong Koo
PY - 2006/12/1
Y1 - 2006/12/1
N2 - Diamond like carbon (DLC) films are known that they show homogeneous alignment property when they are irradiated by Ar ion beam. The DLC films in most of studies were deposited by CVD and contain large mount of hydrogen. In order to identity the hydrogen effect on alignment property, DLC films is deposited by RF magnetron sputter using various ratio of Ar and H2 as reactive gas. DLC films are characterized by FT-IR, Raman and contact angle. Alignment property is estimated by measuring pretilt angle.
AB - Diamond like carbon (DLC) films are known that they show homogeneous alignment property when they are irradiated by Ar ion beam. The DLC films in most of studies were deposited by CVD and contain large mount of hydrogen. In order to identity the hydrogen effect on alignment property, DLC films is deposited by RF magnetron sputter using various ratio of Ar and H2 as reactive gas. DLC films are characterized by FT-IR, Raman and contact angle. Alignment property is estimated by measuring pretilt angle.
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M3 - Conference article
VL - 1
SP - 378
EP - 380
JO - Proceedings of International Meeting on Information Display
JF - Proceedings of International Meeting on Information Display
SN - 1738-7558
ER -