Abstract
Diamond like carbon (DLC) films are known that they show homogeneous alignment property when they are irradiated by Ar ion beam. The DLC films in most of studies were deposited by CVD and contain large mount of hydrogen. In order to identity the hydrogen effect on alignment property, DLC films is deposited by RF magnetron sputter using various ratio of Ar and H2 as reactive gas. DLC films are characterized by FT-IR, Raman and contact angle. Alignment property is estimated by measuring pretilt angle.
| Original language | English |
|---|---|
| Pages (from-to) | 378-380 |
| Number of pages | 3 |
| Journal | Proceedings of International Meeting on Information Display |
| Volume | 1 |
| Publication status | Published - 2006 Dec 1 |
| Event | 5th International Meeting on Information Display - Seoul, Korea, Republic of Duration: 2005 Jul 19 → 2005 Jul 23 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
Cite this
Kim, J. B., Kim, K. C., Ahn, H. J., Hwang, B. H., & Baik, H. K. (2006). Alignment property change in DLC alignment layer containing various hydrogen concentration. Proceedings of International Meeting on Information Display, 1, 378-380.