Alignment property change in DLC alignment layer containing various hydrogen concentration

Jong Bok Kim, Kyung Chan Kim, Han Jin Ahn, Byung Har Hwang, Hong Koo Baik

Research output: Contribution to journalConference article

Abstract

Diamond like carbon (DLC) films are known that they show homogeneous alignment property when they are irradiated by Ar ion beam. The DLC films in most of studies were deposited by CVD and contain large mount of hydrogen. In order to identity the hydrogen effect on alignment property, DLC films is deposited by RF magnetron sputter using various ratio of Ar and H2 as reactive gas. DLC films are characterized by FT-IR, Raman and contact angle. Alignment property is estimated by measuring pretilt angle.

Original languageEnglish
Pages (from-to)378-380
Number of pages3
JournalProceedings of International Meeting on Information Display
Volume1
Publication statusPublished - 2006 Dec 1
Event5th International Meeting on Information Display - Seoul, Korea, Republic of
Duration: 2005 Jul 192005 Jul 23

Fingerprint

Diamond like carbon films
Diamonds
Hydrogen
Carbon
Ion beams
Contact angle
Chemical vapor deposition
Gases

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

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title = "Alignment property change in DLC alignment layer containing various hydrogen concentration",
abstract = "Diamond like carbon (DLC) films are known that they show homogeneous alignment property when they are irradiated by Ar ion beam. The DLC films in most of studies were deposited by CVD and contain large mount of hydrogen. In order to identity the hydrogen effect on alignment property, DLC films is deposited by RF magnetron sputter using various ratio of Ar and H2 as reactive gas. DLC films are characterized by FT-IR, Raman and contact angle. Alignment property is estimated by measuring pretilt angle.",
author = "Kim, {Jong Bok} and Kim, {Kyung Chan} and Ahn, {Han Jin} and Hwang, {Byung Har} and Baik, {Hong Koo}",
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Alignment property change in DLC alignment layer containing various hydrogen concentration. / Kim, Jong Bok; Kim, Kyung Chan; Ahn, Han Jin; Hwang, Byung Har; Baik, Hong Koo.

In: Proceedings of International Meeting on Information Display, Vol. 1, 01.12.2006, p. 378-380.

Research output: Contribution to journalConference article

TY - JOUR

T1 - Alignment property change in DLC alignment layer containing various hydrogen concentration

AU - Kim, Jong Bok

AU - Kim, Kyung Chan

AU - Ahn, Han Jin

AU - Hwang, Byung Har

AU - Baik, Hong Koo

PY - 2006/12/1

Y1 - 2006/12/1

N2 - Diamond like carbon (DLC) films are known that they show homogeneous alignment property when they are irradiated by Ar ion beam. The DLC films in most of studies were deposited by CVD and contain large mount of hydrogen. In order to identity the hydrogen effect on alignment property, DLC films is deposited by RF magnetron sputter using various ratio of Ar and H2 as reactive gas. DLC films are characterized by FT-IR, Raman and contact angle. Alignment property is estimated by measuring pretilt angle.

AB - Diamond like carbon (DLC) films are known that they show homogeneous alignment property when they are irradiated by Ar ion beam. The DLC films in most of studies were deposited by CVD and contain large mount of hydrogen. In order to identity the hydrogen effect on alignment property, DLC films is deposited by RF magnetron sputter using various ratio of Ar and H2 as reactive gas. DLC films are characterized by FT-IR, Raman and contact angle. Alignment property is estimated by measuring pretilt angle.

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