Ambient-dried low dielectric SiO2 aerogel thin film

Hee Sun Yang, Se Young Choi, Sang Hoon Hyun, Hyung Ho Park, Jung Kyun Hong

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Abstract

Silica sol synthesized by two steps was deposited on Si(100) substrate by spin coating. After aging and washing the wet gel film was modified with TMCS (trimethylchlorosilane) to prevent additional condensation during drying. By detecting -CH3(C-H) substituted for -OH species, surface modification was identified by DTA and FTIR. Films dried were heated at different temperatures to investigate heating temperature effects on silica thin film properties. When heated in the range of temperatures (200-500°C), crack-free silica thin films with refractive indices of 1.23-1.15 and dielectric constant 2.2-2.8 were synthesized.

Original languageEnglish
Pages (from-to)151-156
Number of pages6
JournalJournal of Non-Crystalline Solids
Volume221
Issue number2-3
DOIs
Publication statusPublished - 1997 Dec

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

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