Ambient-dried low dielectric SiO2 aerogel thin film

Hee Sun Yang, Se Young Choi, Sang Hoon Hyun, Hyung-Ho Park, Jung Kyun Hong

Research output: Contribution to journalArticle

77 Citations (Scopus)

Abstract

Silica sol synthesized by two steps was deposited on Si(100) substrate by spin coating. After aging and washing the wet gel film was modified with TMCS (trimethylchlorosilane) to prevent additional condensation during drying. By detecting -CH3(C-H) substituted for -OH species, surface modification was identified by DTA and FTIR. Films dried were heated at different temperatures to investigate heating temperature effects on silica thin film properties. When heated in the range of temperatures (200-500°C), crack-free silica thin films with refractive indices of 1.23-1.15 and dielectric constant 2.2-2.8 were synthesized.

Original languageEnglish
Pages (from-to)151-156
Number of pages6
JournalJournal of Non-Crystalline Solids
Volume221
Issue number2-3
DOIs
Publication statusPublished - 1997 Jan 1

Fingerprint

Aerogels
aerogels
Silicon Dioxide
Silica
silicon dioxide
Thin films
thin films
washing
Spin coating
Polymethyl Methacrylate
Sols
Washing
Thermal effects
Differential thermal analysis
drying
temperature effects
Surface treatment
coating
Condensation
Refractive index

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

Cite this

Yang, Hee Sun ; Choi, Se Young ; Hyun, Sang Hoon ; Park, Hyung-Ho ; Hong, Jung Kyun. / Ambient-dried low dielectric SiO2 aerogel thin film. In: Journal of Non-Crystalline Solids. 1997 ; Vol. 221, No. 2-3. pp. 151-156.
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Ambient-dried low dielectric SiO2 aerogel thin film. / Yang, Hee Sun; Choi, Se Young; Hyun, Sang Hoon; Park, Hyung-Ho; Hong, Jung Kyun.

In: Journal of Non-Crystalline Solids, Vol. 221, No. 2-3, 01.01.1997, p. 151-156.

Research output: Contribution to journalArticle

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