A new optomechanical pressure sensor using multimode interference (MMI) couplers and a thin p+-Si membrane is presented. We simulate the device characteristics by the normal mode theory considering deflection and strain of the membrane. The optical waveguide is made of a single-mode, strip-loaded SiO2-SiNx-SiO2 system. Device size can be reduced to 0.5 × 13mm2 by using a MMI coupler, and the total thickness of the membrane is 5.9 μm. The measured sensitivity is 11.98 ppm/Pa in a range of 50kPa, which is larger than that of conventional capacitive sensors.
|Number of pages||5|
|Journal||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|Issue number||4 B|
|Publication status||Published - 1999|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)