An optomechanical pressure sensor using multimode interference couplers

Dooyoung Hah, Euisik Yoon, Songcheol Hong

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

A new optomechanical pressure sensor using multimode interference (MMI) couplers and a thin p+-Si membrane is presented. We simulate the device characteristics by the normal mode theory considering deflection and strain of the membrane. The optical waveguide is made of a single-mode, strip-loaded SiO2-SiNx-SiO2 system. Device size can be reduced to 0.5 × 13mm2 by using a MMI coupler, and the total thickness of the membrane is 5.9 μm. The measured sensitivity is 11.98 ppm/Pa in a range of 50kPa, which is larger than that of conventional capacitive sensors.

Original languageEnglish
Pages (from-to)2664-2668
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number4 B
DOIs
Publication statusPublished - 1999

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'An optomechanical pressure sensor using multimode interference couplers'. Together they form a unique fingerprint.

Cite this