An optomechanical pressure sensor using multimode interference couplers

Dooyoung Hah, Euisik Yoon, Songcheol Hong

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A new optomechanical pressure sensor using multimode interference (MMI) couplers and a thin p+-Si membrane is presented. We simulate the device characteristics by the normal mode theory considering deflection and strain of the membrane. The optical waveguide is made of a single-mode, strip-loaded SiO2-SiNx-SiO2 system. Device size can be reduced to 0.5 × 13mm2 by using a MMI coupler, and the total thickness of the membrane is 5.9 μm. The measured sensitivity is 11.98 ppm/Pa in a range of 50kPa, which is larger than that of conventional capacitive sensors.

Original languageEnglish
Pages (from-to)2664-2668
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number4 B
Publication statusPublished - 1999 Dec 1

Fingerprint

Pressure sensors
pressure sensors
couplers
membranes
Membranes
interference
Capacitive sensors
Optical waveguides
optical waveguides
deflection
strip
sensitivity
sensors

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

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An optomechanical pressure sensor using multimode interference couplers. / Hah, Dooyoung; Yoon, Euisik; Hong, Songcheol.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 38, No. 4 B, 01.12.1999, p. 2664-2668.

Research output: Contribution to journalArticle

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