Analysis and improvement of dynamic characteristic of 3-axis nano stage

Choong Kim, Kang Nyung Lee, Dong Ju Lee, No Cheol Park, Young Pil Park, Jung Woo Park, Dong Jin Lee, Moon Gu Lee, Hyoung Oil Choi, Suk Won Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The precision positioning system requires robust design to obtain enough bandwidth. Therefore, the subresonance occurred by the disaccord efforce center and mass center should be oppressed. And it is necessary to move the flexible mode to a higher frequency. In this paper, the 3-axis nano stage was proposed and dynamic characteristics was improved by design of experiments (DOE).

Original languageEnglish
Title of host publicationProceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
Pages34-38
Number of pages5
DOIs
Publication statusPublished - 2005 Dec 1
Event2005 IEEE International Conference on Mechatronics, ICM '05 - Taipei, Taiwan, Province of China
Duration: 2005 Jul 102005 Jul 12

Publication series

NameProceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
Volume2005

Other

Other2005 IEEE International Conference on Mechatronics, ICM '05
CountryTaiwan, Province of China
CityTaipei
Period05/7/1005/7/12

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • Cite this

    Kim, C., Lee, K. N., Lee, D. J., Park, N. C., Park, Y. P., Park, J. W., Lee, D. J., Lee, M. G., Choi, H. O., & Lee, S. W. (2005). Analysis and improvement of dynamic characteristic of 3-axis nano stage. In Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05 (pp. 34-38). [1529223] (Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05; Vol. 2005). https://doi.org/10.1109/ICMECH.2005.1529223