Analysis of anisotropic in-plane strain behavior in condensed Si1-xGex fin epitaxial layer using X-ray reciprocal space mapping

Hyunchul Jang, Byongju Kim, Sangmo Koo, Yongjoon Choi, Chan Soo Shin, Dae Hong Ko

Research output: Contribution to journalArticlepeer-review

Abstract

Epitaxial Si1-xGex fin layers with x = 0.50 and 0.63 were selectively grown on trench patterned Si (001) substrates with trench widths of 65 and 90 nm. Using a dry oxidation process for the Si1-xGex fin layers, the Ge was condensed by up to ca. 90% while anisotropic in-plane strain was induced. To analyze the anisotropic in-plane strain behavior, reciprocal space mapping measurements were performed in the directions parallel and perpendicular to the fins. After the condensation, a compressive strain of ca. 1% was induced in the direction parallel to the fin. We discuss the uniaxial stress factor influencing the anisotropic in-plane strain of the condensed Si1-xGex fin layer in the two trench patterns.

Original languageEnglish
Article number036502
JournalJapanese journal of applied physics
Volume58
Issue number3
DOIs
Publication statusPublished - 2019 Mar 1

Bibliographical note

Funding Information:
This research was financially supported by a grant from the R&D Programs for both Industrial Core Technology funded by the Ministry of Trade, Industry and Energy (MOTIE), Republic of Korea (Grant No. 10067739) and Nano Material Technology Development Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT (Grant No. 2017M3A7B4049518).

Publisher Copyright:
© 2019 The Japan Society of Applied Physics.

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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