Abstract
A method is proposed for calculating the optical emission spectrometer (OES) light-collection efficiency using the effective solid angle from an arbitrary point source. Based on the point source-OES relative positioning, the effective solid angle is derived for four cases: (1) on axis and on the object plane; (2) on axis and outside the object plane; (3) off axis and on the object plane; and (4) off axis and outside the object plane. The results were in good agreement with those obtained through Monte Carlo ray tracing. After calculating the OES geometrical collection efficiency with respect to the object plane distance in three different-sized cylindrical volume sources, we suggest a simple strategy to increase this efficiency in plasma process monitoring.
| Original language | English |
|---|---|
| Pages (from-to) | 3909-3914 |
| Number of pages | 6 |
| Journal | Applied Optics |
| Volume | 55 |
| Issue number | 15 |
| DOIs | |
| Publication status | Published - 2016 May 20 |
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All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
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Analytical calculation of the light-collection efficiency of an optical emission spectrometer with the effective solid-angle method. / Kang, Minwook; Hahn, Jae Won.
In: Applied Optics, Vol. 55, No. 15, 20.05.2016, p. 3909-3914.Research output: Contribution to journal › Article
TY - JOUR
T1 - Analytical calculation of the light-collection efficiency of an optical emission spectrometer with the effective solid-angle method
AU - Kang, Minwook
AU - Hahn, Jae Won
PY - 2016/5/20
Y1 - 2016/5/20
N2 - A method is proposed for calculating the optical emission spectrometer (OES) light-collection efficiency using the effective solid angle from an arbitrary point source. Based on the point source-OES relative positioning, the effective solid angle is derived for four cases: (1) on axis and on the object plane; (2) on axis and outside the object plane; (3) off axis and on the object plane; and (4) off axis and outside the object plane. The results were in good agreement with those obtained through Monte Carlo ray tracing. After calculating the OES geometrical collection efficiency with respect to the object plane distance in three different-sized cylindrical volume sources, we suggest a simple strategy to increase this efficiency in plasma process monitoring.
AB - A method is proposed for calculating the optical emission spectrometer (OES) light-collection efficiency using the effective solid angle from an arbitrary point source. Based on the point source-OES relative positioning, the effective solid angle is derived for four cases: (1) on axis and on the object plane; (2) on axis and outside the object plane; (3) off axis and on the object plane; and (4) off axis and outside the object plane. The results were in good agreement with those obtained through Monte Carlo ray tracing. After calculating the OES geometrical collection efficiency with respect to the object plane distance in three different-sized cylindrical volume sources, we suggest a simple strategy to increase this efficiency in plasma process monitoring.
UR - http://www.scopus.com/inward/record.url?scp=84971249363&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84971249363&partnerID=8YFLogxK
U2 - 10.1364/AO.55.003909
DO - 10.1364/AO.55.003909
M3 - Article
AN - SCOPUS:84971249363
VL - 55
SP - 3909
EP - 3914
JO - Applied Optics
JF - Applied Optics
SN - 1559-128X
IS - 15
ER -