Analytical calculation of the light-collection efficiency of an optical emission spectrometer with the effective solid-angle method

Minwook Kang, Jae Won Hahn

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A method is proposed for calculating the optical emission spectrometer (OES) light-collection efficiency using the effective solid angle from an arbitrary point source. Based on the point source-OES relative positioning, the effective solid angle is derived for four cases: (1) on axis and on the object plane; (2) on axis and outside the object plane; (3) off axis and on the object plane; and (4) off axis and outside the object plane. The results were in good agreement with those obtained through Monte Carlo ray tracing. After calculating the OES geometrical collection efficiency with respect to the object plane distance in three different-sized cylindrical volume sources, we suggest a simple strategy to increase this efficiency in plasma process monitoring.

Original languageEnglish
Pages (from-to)3909-3914
Number of pages6
JournalApplied Optics
Volume55
Issue number15
DOIs
Publication statusPublished - 2016 May 20

Fingerprint

light emission
Spectrometers
spectrometers
Light sources
point sources
Process monitoring
Ray tracing
ray tracing
positioning
Plasmas

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Cite this

@article{246cfd829726478ba258f044bb8ccd4e,
title = "Analytical calculation of the light-collection efficiency of an optical emission spectrometer with the effective solid-angle method",
abstract = "A method is proposed for calculating the optical emission spectrometer (OES) light-collection efficiency using the effective solid angle from an arbitrary point source. Based on the point source-OES relative positioning, the effective solid angle is derived for four cases: (1) on axis and on the object plane; (2) on axis and outside the object plane; (3) off axis and on the object plane; and (4) off axis and outside the object plane. The results were in good agreement with those obtained through Monte Carlo ray tracing. After calculating the OES geometrical collection efficiency with respect to the object plane distance in three different-sized cylindrical volume sources, we suggest a simple strategy to increase this efficiency in plasma process monitoring.",
author = "Minwook Kang and Hahn, {Jae Won}",
year = "2016",
month = "5",
day = "20",
doi = "10.1364/AO.55.003909",
language = "English",
volume = "55",
pages = "3909--3914",
journal = "Applied Optics",
issn = "1559-128X",
publisher = "The Optical Society",
number = "15",

}

Analytical calculation of the light-collection efficiency of an optical emission spectrometer with the effective solid-angle method. / Kang, Minwook; Hahn, Jae Won.

In: Applied Optics, Vol. 55, No. 15, 20.05.2016, p. 3909-3914.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Analytical calculation of the light-collection efficiency of an optical emission spectrometer with the effective solid-angle method

AU - Kang, Minwook

AU - Hahn, Jae Won

PY - 2016/5/20

Y1 - 2016/5/20

N2 - A method is proposed for calculating the optical emission spectrometer (OES) light-collection efficiency using the effective solid angle from an arbitrary point source. Based on the point source-OES relative positioning, the effective solid angle is derived for four cases: (1) on axis and on the object plane; (2) on axis and outside the object plane; (3) off axis and on the object plane; and (4) off axis and outside the object plane. The results were in good agreement with those obtained through Monte Carlo ray tracing. After calculating the OES geometrical collection efficiency with respect to the object plane distance in three different-sized cylindrical volume sources, we suggest a simple strategy to increase this efficiency in plasma process monitoring.

AB - A method is proposed for calculating the optical emission spectrometer (OES) light-collection efficiency using the effective solid angle from an arbitrary point source. Based on the point source-OES relative positioning, the effective solid angle is derived for four cases: (1) on axis and on the object plane; (2) on axis and outside the object plane; (3) off axis and on the object plane; and (4) off axis and outside the object plane. The results were in good agreement with those obtained through Monte Carlo ray tracing. After calculating the OES geometrical collection efficiency with respect to the object plane distance in three different-sized cylindrical volume sources, we suggest a simple strategy to increase this efficiency in plasma process monitoring.

UR - http://www.scopus.com/inward/record.url?scp=84971249363&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84971249363&partnerID=8YFLogxK

U2 - 10.1364/AO.55.003909

DO - 10.1364/AO.55.003909

M3 - Article

AN - SCOPUS:84971249363

VL - 55

SP - 3909

EP - 3914

JO - Applied Optics

JF - Applied Optics

SN - 1559-128X

IS - 15

ER -