Angular vertical comb actuators assembled on-chip using in-plane electrothermal actuators and latching mechanisms

Youngkee Eun, Hyungjoo Na, Jungwook Choi, Jae Ik Lee, Jongbaeg Kim

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

We have designed, fabricated and tested self-aligned angular vertical comb-drive (AVC) actuators by on-chip assembly using in-plane electrothermal actuators and latching mechanisms. The on-chip assembly process is carried out by engaging latching mechanism connected to the torsion bars through the off-centered thinned down silicon beams. When the latching mechanism is fully engaged, the assembled AVC actuator forms permanent initial tilt angle by the retraction force of electrothermal actuators. The AVC actuators and latching mechanisms are fabricated on a silicon-on-insulator (SOI) wafer using three photomasks and three times of deep etch steps. The maximum optical scan angle of 30.7° is achieved at 4.56 kHz under the sinusoidal driving voltage of 0-80 V applied to the AVC actuator. After the reliability test performed by operating the actuator for 1.6 × 108 cycles at its resonance, the measured optical scan angle variation and resonant frequency change were within 1.1% and 8 Hz, respectively, and the robustness of the latched mechanism was ensured.

Original languageEnglish
Pages (from-to)94-100
Number of pages7
JournalSensors and Actuators, A: Physical
Volume165
Issue number1
DOIs
Publication statusPublished - 2011 Jan 1

Fingerprint

Actuators
actuators
chips
Silicon
assembly
Photomasks
photomasks
silicon
Torsional stress
torsion
resonant frequencies
Natural frequencies
insulators
wafers
cycles
Electric potential
electric potential

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

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title = "Angular vertical comb actuators assembled on-chip using in-plane electrothermal actuators and latching mechanisms",
abstract = "We have designed, fabricated and tested self-aligned angular vertical comb-drive (AVC) actuators by on-chip assembly using in-plane electrothermal actuators and latching mechanisms. The on-chip assembly process is carried out by engaging latching mechanism connected to the torsion bars through the off-centered thinned down silicon beams. When the latching mechanism is fully engaged, the assembled AVC actuator forms permanent initial tilt angle by the retraction force of electrothermal actuators. The AVC actuators and latching mechanisms are fabricated on a silicon-on-insulator (SOI) wafer using three photomasks and three times of deep etch steps. The maximum optical scan angle of 30.7° is achieved at 4.56 kHz under the sinusoidal driving voltage of 0-80 V applied to the AVC actuator. After the reliability test performed by operating the actuator for 1.6 × 108 cycles at its resonance, the measured optical scan angle variation and resonant frequency change were within 1.1{\%} and 8 Hz, respectively, and the robustness of the latched mechanism was ensured.",
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Angular vertical comb actuators assembled on-chip using in-plane electrothermal actuators and latching mechanisms. / Eun, Youngkee; Na, Hyungjoo; Choi, Jungwook; Lee, Jae Ik; Kim, Jongbaeg.

In: Sensors and Actuators, A: Physical, Vol. 165, No. 1, 01.01.2011, p. 94-100.

Research output: Contribution to journalArticle

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AU - Na, Hyungjoo

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AU - Kim, Jongbaeg

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AB - We have designed, fabricated and tested self-aligned angular vertical comb-drive (AVC) actuators by on-chip assembly using in-plane electrothermal actuators and latching mechanisms. The on-chip assembly process is carried out by engaging latching mechanism connected to the torsion bars through the off-centered thinned down silicon beams. When the latching mechanism is fully engaged, the assembled AVC actuator forms permanent initial tilt angle by the retraction force of electrothermal actuators. The AVC actuators and latching mechanisms are fabricated on a silicon-on-insulator (SOI) wafer using three photomasks and three times of deep etch steps. The maximum optical scan angle of 30.7° is achieved at 4.56 kHz under the sinusoidal driving voltage of 0-80 V applied to the AVC actuator. After the reliability test performed by operating the actuator for 1.6 × 108 cycles at its resonance, the measured optical scan angle variation and resonant frequency change were within 1.1% and 8 Hz, respectively, and the robustness of the latched mechanism was ensured.

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