Angular vertical comb actuators assembled on-chip using in-plane electrothermal actuators and latching mechanisms

Youngkee Eun, Hyungjoo Na, Jungwook Choi, Jae Ik Lee, Jongbaeg Kim

Research output: Contribution to journalArticle

3 Citations (Scopus)

Fingerprint Dive into the research topics of 'Angular vertical comb actuators assembled on-chip using in-plane electrothermal actuators and latching mechanisms'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science