Annealing effect on the structural and optical properties of ZnO thin film on InP

Eun Sub Shim, Hong Seong Kang, Seong Sik Pang, Jeong Seok Kang, Ilgu Yun, Sang Yeol Lee

Research output: Contribution to journalConference article

70 Citations (Scopus)

Abstract

II-VI semiconducting ZnO thin films have been fabricated by pulsed laser deposition (PLD) process on indium phosphide (InP) (100) substrates. Thin films were annealed at various temperatures in order to study the annealing temperature dependence of the structural and optical properties of ZnO thin film grown on InP substrate. The structural and optical properties were characterized with X-ray diffraction (XRD) and photoluminescence (PL), respectively. In our study, we have found some defect levels from the PL spectra and derived the defect center's activation energy. According to XRD data, it could be thought that the films had some strains but relaxed by annealing processes.

Original languageEnglish
Pages (from-to)366-369
Number of pages4
JournalMaterials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume102
Issue number1-3
DOIs
Publication statusPublished - 2003 Sep 15
EventE-MRS 2002 Symposium E - Strasbourg, France
Duration: 2002 Jun 182002 Jun 21

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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