Application of gap servo near-field system to active measurement on nanostructure topology

Hyun Choi, Joong Gon Kim, Wan Chin Kim, No Cheol Park, Young Pil Park

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We introduce application of gap servo near-field system to measurement topology. We use air gap control that consists of mode switch servo for measurement of nanostructure topology. We obtained primitive experimental results at frequency domain.

Original languageEnglish
Title of host publicationOptical Data Storage, ODS 2007
PublisherOptical Society of America (OSA)
ISBN (Print)1557528403, 9781557528407
DOIs
Publication statusPublished - 2007
EventOptical Data Storage, ODS 2007 - Portland, OR, United States
Duration: 2007 May 20 → 2007 May 20

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherOptical Data Storage, ODS 2007
CountryUnited States
CityPortland, OR
Period07/5/20 → 07/5/20

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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    Choi, H., Kim, J. G., Kim, W. C., Park, N. C., & Park, Y. P. (2007). Application of gap servo near-field system to active measurement on nanostructure topology. In Optical Data Storage, ODS 2007 (Optics InfoBase Conference Papers). Optical Society of America (OSA). https://doi.org/10.1364/ods.2007.md3