@inproceedings{f7259ab1b0654f419709f096aee29336,
title = "Application of gap servo near-field system to active measurement on nanostructure topology",
abstract = "We introduce application of gap servo near-field system to measurement topology. We use air gap control that consists of mode switch servo for measurement of nanostructure topology. We obtained primitive experimental results at frequency domain.",
author = "Hyun Choi and Kim, {Joong Gon} and Kim, {Wan Chin} and Park, {No Cheol} and Park, {Young Pil}",
year = "2007",
doi = "10.1364/ods.2007.md3",
language = "English",
isbn = "1557528403",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America (OSA)",
booktitle = "Optical Data Storage, ODS 2007",
note = "Optical Data Storage, ODS 2007 ; Conference date: 20-05-2007 Through 20-05-2007",
}