Application of low temperature GaAs to GaAs/Si

Hiroshi Fujioka; Hyunchul Sohn; Eicke R. Weber; Ashish Verma

doi:10.1007/BF02650010

Application of low temperature GaAs to GaAs/Si

Hiroshi Fujioka, Hyunchul Sohn, Eicke R. Weber, Ashish Verma

Department of Materials Science and Engineering

Research output: Contribution to journal › Article

4 Citations (Scopus)

Abstract

Low Temperature grown GaAs (LT-GaAs) was incorporated as a buffer layer for GaAs on Si (GaAs/Si) and striking advantages of this structure were confirmed. The LT-GaAs layer showed high resistivity of 1.7 × 10⁷ ω-cm even on a highly defective GaAs/Si. GaAs/Si with the LT-GaAs buffer layers had smoother surfaces and showed much higher photoluminescence intensities than those without LT-GaAs. Schottky diodes fabricated on GaAs/Si with LT-GaAs showed a drastically reduced leakage current and an improved ideality factor. These results indicate that the LT-GaAs buffer layer is promising for future integrated circuits which utilize GaAs/Si substrates.

Original language	English
Pages (from-to)	1511-1514
Number of pages	4
Journal	Journal of Electronic Materials
Volume	22
Issue number	12
DOIs	https://doi.org/10.1007/BF02650010
Publication status	Published - 1993 Dec 1

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All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

Cite this

Fujioka, H., Sohn, H., Weber, E. R., & Verma, A. (1993). Application of low temperature GaAs to GaAs/Si. Journal of Electronic Materials, 22(12), 1511-1514. https://doi.org/10.1007/BF02650010

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AU - Fujioka, Hiroshi

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AB - Low Temperature grown GaAs (LT-GaAs) was incorporated as a buffer layer for GaAs on Si (GaAs/Si) and striking advantages of this structure were confirmed. The LT-GaAs layer showed high resistivity of 1.7 × 107 ω-cm even on a highly defective GaAs/Si. GaAs/Si with the LT-GaAs buffer layers had smoother surfaces and showed much higher photoluminescence intensities than those without LT-GaAs. Schottky diodes fabricated on GaAs/Si with LT-GaAs showed a drastically reduced leakage current and an improved ideality factor. These results indicate that the LT-GaAs buffer layer is promising for future integrated circuits which utilize GaAs/Si substrates.

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Access to Document

10.1007/BF02650010