Area-selective chemical vapor deposition of Co for Cu capping layer

Seung Wook Ryu, Soohyeon Kim, Jaehong Yoon, Jukka T. Tanskanen, Hyungjun Kim, Han Bo Ram Lee

Research output: Contribution to journalArticle

6 Citations (Scopus)

Fingerprint Dive into the research topics of 'Area-selective chemical vapor deposition of Co for Cu capping layer'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy