The use of focused ion-beam (FIB) nanopatterning for manipulating self-assembled ZnO nanodots is described. Highly aligned ZnO-nanodot arrays with various periodicities (e.g., 750, 190, and 100 nm) on FIB-nanopatterned SiO2 Si substrates were prepared by metal-organic chemical-vapor deposition (MOCVD). The artificially assembled ZnO nanodots had an amorphous structure. Ga atoms incorporated into the surface areas of FIB-patterned nanoholes during FIB engraving were found to play an important role in the artificial control of ZnO, resulting in the production of ZnO nanodots on the FIB-nanopatterned areas. The nanodots evolved into single-crystalline dot clusters and rods with increasing MOCVD-growth time. In addition, microphotoluminescence measurements showed that the ZnO-nanodot arrays have low-dimensional quantum characteristics.
|Journal||Journal of Applied Physics|
|Publication status||Published - 2005 May 15|
Bibliographical noteFunding Information:
This work was partly supported by a grant-in-aid for scientific research and also by grants for regional science and technology promotion from the Ministry of Education, Culture, Sports, Science, and Technology of Japan.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)