Artificial control of ZnO nanodots by ion-beam nanopatterning

Sang Woo Kim, Masaya Ueda, Mitsuru Funato, Shigeo Fujita, Shizuo Fujita

Research output: Contribution to journalArticlepeer-review


The use of focused ion-beam (FIB) nanopatterning for manipulating self-assembled ZnO nanodots is described. Highly aligned ZnO-nanodot arrays with various periodicities (e.g., 750, 190, and 100 nm) on FIB-nanopatterned SiO2 Si substrates were prepared by metal-organic chemical-vapor deposition (MOCVD). The artificially assembled ZnO nanodots had an amorphous structure. Ga atoms incorporated into the surface areas of FIB-patterned nanoholes during FIB engraving were found to play an important role in the artificial control of ZnO, resulting in the production of ZnO nanodots on the FIB-nanopatterned areas. The nanodots evolved into single-crystalline dot clusters and rods with increasing MOCVD-growth time. In addition, microphotoluminescence measurements showed that the ZnO-nanodot arrays have low-dimensional quantum characteristics.

Original languageEnglish
Article number104316
JournalJournal of Applied Physics
Issue number10
Publication statusPublished - 2005 May 15

Bibliographical note

Funding Information:
This work was partly supported by a grant-in-aid for scientific research and also by grants for regional science and technology promotion from the Ministry of Education, Culture, Sports, Science, and Technology of Japan.

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)


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