Artificial control of ZnO nanodots by ion-beam nanopatterning

Sang Woo Kim; Masaya Ueda; Mitsuru Funato; Shigeo Fujita; Shizuo Fujita

doi:10.1063/1.1898446

Artificial control of ZnO nanodots by ion-beam nanopatterning

Sang Woo Kim, Masaya Ueda, Mitsuru Funato, Shigeo Fujita, Shizuo Fujita

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

The use of focused ion-beam (FIB) nanopatterning for manipulating self-assembled ZnO nanodots is described. Highly aligned ZnO-nanodot arrays with various periodicities (e.g., 750, 190, and 100 nm) on FIB-nanopatterned SiO2 Si substrates were prepared by metal-organic chemical-vapor deposition (MOCVD). The artificially assembled ZnO nanodots had an amorphous structure. Ga atoms incorporated into the surface areas of FIB-patterned nanoholes during FIB engraving were found to play an important role in the artificial control of ZnO, resulting in the production of ZnO nanodots on the FIB-nanopatterned areas. The nanodots evolved into single-crystalline dot clusters and rods with increasing MOCVD-growth time. In addition, microphotoluminescence measurements showed that the ZnO-nanodot arrays have low-dimensional quantum characteristics.

Original language	English
Article number	104316
Journal	Journal of Applied Physics
Volume	97
Issue number	10
DOIs	https://doi.org/10.1063/1.1898446
Publication status	Published - 2005 May 15

Bibliographical note

Funding Information:
This work was partly supported by a grant-in-aid for scientific research and also by grants for regional science and technology promotion from the Ministry of Education, Culture, Sports, Science, and Technology of Japan.

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

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10.1063/1.1898446

Cite this

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title = "Artificial control of ZnO nanodots by ion-beam nanopatterning",

abstract = "The use of focused ion-beam (FIB) nanopatterning for manipulating self-assembled ZnO nanodots is described. Highly aligned ZnO-nanodot arrays with various periodicities (e.g., 750, 190, and 100 nm) on FIB-nanopatterned SiO2 Si substrates were prepared by metal-organic chemical-vapor deposition (MOCVD). The artificially assembled ZnO nanodots had an amorphous structure. Ga atoms incorporated into the surface areas of FIB-patterned nanoholes during FIB engraving were found to play an important role in the artificial control of ZnO, resulting in the production of ZnO nanodots on the FIB-nanopatterned areas. The nanodots evolved into single-crystalline dot clusters and rods with increasing MOCVD-growth time. In addition, microphotoluminescence measurements showed that the ZnO-nanodot arrays have low-dimensional quantum characteristics.",

author = "Kim, {Sang Woo} and Masaya Ueda and Mitsuru Funato and Shigeo Fujita and Shizuo Fujita",

note = "Funding Information: This work was partly supported by a grant-in-aid for scientific research and also by grants for regional science and technology promotion from the Ministry of Education, Culture, Sports, Science, and Technology of Japan.",

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doi = "10.1063/1.1898446",

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AU - Kim, Sang Woo

AU - Ueda, Masaya

AU - Funato, Mitsuru

AU - Fujita, Shigeo

AU - Fujita, Shizuo

N1 - Funding Information: This work was partly supported by a grant-in-aid for scientific research and also by grants for regional science and technology promotion from the Ministry of Education, Culture, Sports, Science, and Technology of Japan.

PY - 2005/5/15

Y1 - 2005/5/15

N2 - The use of focused ion-beam (FIB) nanopatterning for manipulating self-assembled ZnO nanodots is described. Highly aligned ZnO-nanodot arrays with various periodicities (e.g., 750, 190, and 100 nm) on FIB-nanopatterned SiO2 Si substrates were prepared by metal-organic chemical-vapor deposition (MOCVD). The artificially assembled ZnO nanodots had an amorphous structure. Ga atoms incorporated into the surface areas of FIB-patterned nanoholes during FIB engraving were found to play an important role in the artificial control of ZnO, resulting in the production of ZnO nanodots on the FIB-nanopatterned areas. The nanodots evolved into single-crystalline dot clusters and rods with increasing MOCVD-growth time. In addition, microphotoluminescence measurements showed that the ZnO-nanodot arrays have low-dimensional quantum characteristics.

AB - The use of focused ion-beam (FIB) nanopatterning for manipulating self-assembled ZnO nanodots is described. Highly aligned ZnO-nanodot arrays with various periodicities (e.g., 750, 190, and 100 nm) on FIB-nanopatterned SiO2 Si substrates were prepared by metal-organic chemical-vapor deposition (MOCVD). The artificially assembled ZnO nanodots had an amorphous structure. Ga atoms incorporated into the surface areas of FIB-patterned nanoholes during FIB engraving were found to play an important role in the artificial control of ZnO, resulting in the production of ZnO nanodots on the FIB-nanopatterned areas. The nanodots evolved into single-crystalline dot clusters and rods with increasing MOCVD-growth time. In addition, microphotoluminescence measurements showed that the ZnO-nanodot arrays have low-dimensional quantum characteristics.

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Artificial control of ZnO nanodots by ion-beam nanopatterning

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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