Assembly and evaluation of a SIL optical head for cover-layered incident NFR without disk contact with the bottom surface of a SIL

Yong Joong Yoon, Cheol Ki Min, Wan Chin Kim, No Cheol Park, Young Pil Park

Research output: Contribution to journalArticlepeer-review

Abstract

In the assembly of the solid immersion lens (SIL) optical head for cover-layered incident near-field recordings (NFRs), disk contact with the bottom surface of the SIL has previously been regarded as essential. This is because SIL optical heads are designed to interface with a cover layer. However, SILs can be contaminated and damaged by this contact. We present a new SIL optical head assembly method for cover-layered incident NFRs without disk contact with the bottom surface of the SIL. To achieve this, we added zoom optics to a Twyman-Green interferometer in the measurement beam optical path. Our assembly method eliminates SIL contamination problems and the assembly procedure becomes simple because of removing the disk contact process. In addition, it is not necessary to consider the aberrations induced by disk tilt and cover-layer thickness variation. The SIL optical head assembled by the proposed method has good optical performance satisfying the optical tolerances and the measured wavefront aberration is good agreement with simulations.

Original languageEnglish
Pages (from-to)103-109
Number of pages7
JournalMicrosystem Technologies
Volume16
Issue number1-2
DOIs
Publication statusPublished - 2010 Jan

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Assembly and evaluation of a SIL optical head for cover-layered incident NFR without disk contact with the bottom surface of a SIL'. Together they form a unique fingerprint.

Cite this