Atomic layer deposited Pt nanoparticles on functionalized MoS2 as highly sensitive H2 sensor

Sungje Lee, Yunsung Kang, Jaehyeong Lee, Jingyung Kim, Jeong Woo Shin, Sangjun Sim, Dohyun Go, Eunhwan Jo, Seunghyeon Kye, Jongbaeg Kim, Jihwan An

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Hydrogen gas (H2) has garnered significant attention as an alternative clean energy source, and its sensitive detection is essential to prevent explosions due to leakage in storage systems. Molybdenum disulfide (MoS2), which exhibits a large surface area-to-volume ratio from atomically thin two-dimensional (2D) structure, has attracted attention as a suitable H2 sensing material. However, pristine MoS2 exhibits low sensitivity to nonpolar H2. This paper demonstrates a decoration method for platinum (Pt) catalysts on 2D MoS2 using atomic layer deposition (ALD) and its application to fabricate highly sensitive H2 sensors. Additionally, to induce homogeneous distribution of Pt nanoparticles on chemically inert MoS2 surfaces, oxygen plasma pretreatment is employed as the MoS2 surface functionalization method. Consequently, highly sensitive detection of H2 with the sensitivity over 400 and the lower detection limit set to 2.5 ppm, is achieved using ALD Pt-decorated MoS2, and a sensing mechanism is proposed.

Original languageEnglish
Article number151256
JournalApplied Surface Science
Publication statusPublished - 2022 Jan 1

Bibliographical note

Funding Information:
J. An acknowledges the financial support from Nano-Convergence Foundation funded by the Ministry of Trade, Industry and Energy (MOTIE) of Korea (No.20000272) and National Research Foundation of Korea (NRF) funded by the Korea government (MSIP) (No. NRF-2018R1C1B6001150). J. Kim also acknowledges the support from Brain Convergence Research Program of the National Research Foundation (NRF) funded by the Korean government (MSIT) (No. NRF-2019M3E5D2A01063814). We thank Ji Yoon Shin and Prof. Tae Hoon Lee for the help in AFM measurement.

Publisher Copyright:
© 2021 Elsevier B.V.

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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