Atomic-Layer-Deposition-Based 2D Transition Metal Chalcogenides: Synthesis, Modulation, and Applications

Youngjun Kim, Whang Je Woo, Donghyun Kim, Sangyoon Lee, Seung min Chung, Jusang Park, Hyungjun Kim

Research output: Contribution to journalReview articlepeer-review

26 Citations (Scopus)


Transition metal chalcogenides (TMCs) are a large family of 2D materials with different properties, and are promising candidates for a wide range of applications such as nanoelectronics, sensors, energy conversion, and energy storage. In the research of new materials, the development and investigation of industry-compatible synthesis techniques is of key importance. In this respect, it is important to study 2D TMC materials synthesized by the atomic layer deposition (ALD) technique, which is widely applied in industries. In addition to the synthesis of 2D TMCs, ALD is used to modulate the characteristic of 2D TMCs such as their carrier density and morphology. So far, the improvement of thin film uniformity without oxidation and the synthesis of low-dimensional nanomaterials on 2D TMCs have been the research focus. Herein, the synthesis and modulation of 2D TMCs by ALD is described, and the characteristics of ALD-based TMCs used in nanoelectronics, sensors, and energy applications are discussed.

Original languageEnglish
Article number2005907
JournalAdvanced Materials
Issue number47
Publication statusPublished - 2021 Nov 25

Bibliographical note

Funding Information:
Y.K., W.J.W., and D.K. contributed equally to this work. This work was supported by the Materials and Components Technology Development Program of MOTIE/KEIT (10080527, “Development of commercialization technology of highly sensitive gas sensor based on chalcogenide 2D nanomaterial”), and the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science, and Technology (NRF‐2018R1D1A1A09084143).

Publisher Copyright:
© 2021 Wiley-VCH GmbH.

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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