Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process

Woo Hee Kim, Il Kwon Oh, Min Kyu Kim, Wan Joo Maeng, Chang Wan Lee, Gyeongho Lee, Clement Lansalot-Matras, Wontae Noh, David Thompson, David Chu, Hyungjun Kim

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22 Citations (Scopus)

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