Atomic-layer deposition of crystalline BeO on SiC

Seung Min Lee, Yoonseo Jang, Jongho Jung, Jung Hwan Yum, Eric S. Larsen, Christopher W. Bielawski, Weijie Wang, Jae Hyun Ryou, Hyun Seop Kim, Ho Young Cha, Jungwoo Oh

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Chemical Compounds

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