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Atomic layer deposition of Ni thin films and application to area-selective deposition
Woo Hee Kim, Han Bo Ram Lee, Kwang Heo, Young Kuk Lee, Taek Mo Chung, Chang Gyoun Kim, Seunghun Hong, Jong Heo, Hyungjun Kim
Research output: Contribution to journal › Article › peer-review
68
Citations
(Scopus)