Atomic layer deposition of Ni thin films and application to area-selective deposition

Woo Hee Kim, Han Bo Ram Lee, Kwang Heo, Young Kuk Lee, Taek Mo Chung, Chang Gyoun Kim, Seunghun Hong, Jong Heo, Hyungjun Kim

Research output: Contribution to journalArticlepeer-review

68 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds