Atomic transport and stability during annealing of HfO2 and HfAlO with an ultrathin layer of SiO2 on Si(001)

Hyo Sik Chang, Hyunsang Hwang, Mann Ho Cho, Hyun Kyung Kim, Dae Won Moon

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

The microstructure of HfO2/SiO2/Si and HfAlO/SiO 2/Si layered structures was investigated by medium energy ion scattering spectroscopy. The films were prepared by atomic layer chemical vapor deposition. The effect of interface strain on the thermal stability of the films was investigated. It was found that HfAlO film exhibits much stronger resistance to the oxygen diffusion than the HfO2 film.

Original languageEnglish
Pages (from-to)165-169
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume22
Issue number1
DOIs
Publication statusPublished - 2004 Jan 1

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Annealing
annealing
ion scattering
Chemical vapor deposition
Thermodynamic stability
thermal stability
vapor deposition
Spectroscopy
Scattering
Ions
Oxygen
microstructure
Microstructure
oxygen
spectroscopy
energy

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

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abstract = "The microstructure of HfO2/SiO2/Si and HfAlO/SiO 2/Si layered structures was investigated by medium energy ion scattering spectroscopy. The films were prepared by atomic layer chemical vapor deposition. The effect of interface strain on the thermal stability of the films was investigated. It was found that HfAlO film exhibits much stronger resistance to the oxygen diffusion than the HfO2 film.",
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Atomic transport and stability during annealing of HfO2 and HfAlO with an ultrathin layer of SiO2 on Si(001). / Chang, Hyo Sik; Hwang, Hyunsang; Cho, Mann Ho; Kim, Hyun Kyung; Moon, Dae Won.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 22, No. 1, 01.01.2004, p. 165-169.

Research output: Contribution to journalArticle

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AU - Chang, Hyo Sik

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AU - Cho, Mann Ho

AU - Kim, Hyun Kyung

AU - Moon, Dae Won

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