Batch-fabricated scanning micromirrors using localized plastic deformation of silicon

Jongbaeg Kim, Liwei Lin

Research output: Contribution to journalConference article

12 Citations (Scopus)

Abstract

We have demonstrated batch-processed scanning micromirrors using self-aligned and localized plastic deformation of silicon such that the whole process is compatible with on-chip microelectronics. The micromirrors are made of single-crystal silicon and actuated by self-aligned vertical comb-sets at a resonant frequency of 4.13kHz with optical scanning angles up to 50.9 degrees under driving voltages of 30V dc plus 14V pp. After continuous operation of 6 billion cycles at the maximum scanning angle, there appears to be no observable degradation or fatigue of the plastically deformed silicon torsion bars. Novel designs for torsional springs to prevent the buckling problem due to the non-uniform thermal expansion by localized heating are also presented.

Original languageEnglish
Pages (from-to)494-497
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2004 Jul 19
Event17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands
Duration: 2004 Jan 252004 Jan 29

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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