Batch-fabricated scanning micromirrors using localized plastic deformation of silicon

Jongbaeg Kim, Liwei Lin

Research output: Contribution to journalConference articlepeer-review

12 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Batch-fabricated scanning micromirrors using localized plastic deformation of silicon'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy