Batch-processed semiconductor gas sensor array for the selective detection of NOx in automotive exhaust gas

Hani Jang, Minki Kim, Yongjun Kim

Research output: Contribution to journalArticle

Abstract

This paper reports on a semiconductor gas sensor array to detect nitrogen oxides (NOx) in automotive exhaust gas. The proposed semiconductor gas sensor array consisted of one common electrode and three individual electrodes to minimize the size of the sensor array, and three sensing layers [TiO2 + SnO2 (15 wt%), SnO2, and Ga2O3] were deposited using screen printing. In addition, sensing materials were sintered under the same conditions in order to take advantage of batch processing. The sensing properties of the proposed sensor array were verified by experimental measurements, and the selectivity improved by using pattern recognition.

Original languageEnglish
Article number6
JournalMicro and Nano Systems Letters
Volume4
Issue number1
DOIs
Publication statusPublished - 2016 Dec 1

All Science Journal Classification (ASJC) codes

  • Biomaterials
  • Biomedical Engineering

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