Batch-processed semiconductor gas sensor array for the selective detection of NO x in automotive exhaust gas

Hani Jang, Minki Kim, Yong-Jun Kim

Research output: Contribution to journalLetter

Abstract

This paper reports on a semiconductor gas sensor array to detect nitrogen oxides (NO x ) in automotive exhaust gas. The proposed semiconductor gas sensor array consisted of one common electrode and three individual electrodes to minimize the size of the sensor array, and three sensing layers [TiO 2  + SnO 2 (15 wt%), SnO 2 , and Ga 2 O 3 ] were deposited using screen printing. In addition, sensing materials were sintered under the same conditions in order to take advantage of batch processing. The sensing properties of the proposed sensor array were verified by experimental measurements, and the selectivity improved by using pattern recognition.

Original languageEnglish
Article number6
JournalMicro and Nano Systems Letters
Volume4
Issue number1
DOIs
Publication statusPublished - 2016 Dec 1

Fingerprint

Sensor arrays
Exhaust gases
Chemical sensors
Semiconductor materials
Nitrogen Oxides
Electrodes
Screen printing
Nitrogen oxides
Pattern recognition

All Science Journal Classification (ASJC) codes

  • Biomaterials
  • Biomedical Engineering

Cite this

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title = "Batch-processed semiconductor gas sensor array for the selective detection of NO x in automotive exhaust gas",
abstract = "This paper reports on a semiconductor gas sensor array to detect nitrogen oxides (NO x ) in automotive exhaust gas. The proposed semiconductor gas sensor array consisted of one common electrode and three individual electrodes to minimize the size of the sensor array, and three sensing layers [TiO 2  + SnO 2 (15 wt{\%}), SnO 2 , and Ga 2 O 3 ] were deposited using screen printing. In addition, sensing materials were sintered under the same conditions in order to take advantage of batch processing. The sensing properties of the proposed sensor array were verified by experimental measurements, and the selectivity improved by using pattern recognition.",
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Batch-processed semiconductor gas sensor array for the selective detection of NO x in automotive exhaust gas . / Jang, Hani; Kim, Minki; Kim, Yong-Jun.

In: Micro and Nano Systems Letters, Vol. 4, No. 1, 6, 01.12.2016.

Research output: Contribution to journalLetter

TY - JOUR

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AU - Jang, Hani

AU - Kim, Minki

AU - Kim, Yong-Jun

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N2 - This paper reports on a semiconductor gas sensor array to detect nitrogen oxides (NO x ) in automotive exhaust gas. The proposed semiconductor gas sensor array consisted of one common electrode and three individual electrodes to minimize the size of the sensor array, and three sensing layers [TiO 2  + SnO 2 (15 wt%), SnO 2 , and Ga 2 O 3 ] were deposited using screen printing. In addition, sensing materials were sintered under the same conditions in order to take advantage of batch processing. The sensing properties of the proposed sensor array were verified by experimental measurements, and the selectivity improved by using pattern recognition.

AB - This paper reports on a semiconductor gas sensor array to detect nitrogen oxides (NO x ) in automotive exhaust gas. The proposed semiconductor gas sensor array consisted of one common electrode and three individual electrodes to minimize the size of the sensor array, and three sensing layers [TiO 2  + SnO 2 (15 wt%), SnO 2 , and Ga 2 O 3 ] were deposited using screen printing. In addition, sensing materials were sintered under the same conditions in order to take advantage of batch processing. The sensing properties of the proposed sensor array were verified by experimental measurements, and the selectivity improved by using pattern recognition.

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