This paper reports on a semiconductor gas sensor array to detect nitrogen oxides (NOx) in automotive exhaust gas. The proposed semiconductor gas sensor array consisted of one common electrode and three individual electrodes to minimize the size of the sensor array, and three sensing layers [TiO2 + SnO2 (15 wt%), SnO2, and Ga2O3] were deposited using screen printing. In addition, sensing materials were sintered under the same conditions in order to take advantage of batch processing. The sensing properties of the proposed sensor array were verified by experimental measurements, and the selectivity improved by using pattern recognition.
Bibliographical noteFunding Information:
This work was supported by the R&D program of MOTIE/KEIT. [10054548, Development of Suspended Heterogeneous Nanostructure‑based Hazardous Gas Microsensor System].
All Science Journal Classification (ASJC) codes
- Biomedical Engineering