Beam alignment for scanning beam interference lithography

Carl G. Chen, Ralf K. Heilmann, Chulmin Joo, Paul T. Konkola, G. S. Pati, Mark L. Schattenburg

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)

Fingerprint Dive into the research topics of 'Beam alignment for scanning beam interference lithography'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science