Bidirectional electrothermal electromagnetic torsional microactuators for large angular motion at dc mode and high frequency resonance mode operation

Youngkee Eun, Hyungjoo Na, Bongwon Jeong, Jae Ik Lee, Jongbaeg Kim

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

This paper presents a novel design of a bidirectional torsional micromirror utilizing vertically driven electrothermal electromagnetic silicon beam actuators to generate large angular motion in both static mode and high-frequency resonance mode with low operational voltages. The microactuators are fabricated on a silicon-on-insulator (SOI) wafer using three photo masks in order to form two different thicknesses of single crystal silicon (SCS) device layer and backside cavities. When the driving bias is applied to the device in the static mode operation, four buckle beams placed alongside the torsion bars are subjected to thermal expansion and buckle in the vertical direction generating torsional displacement of the micromirror with respect to two torsion bars, the center of rotation. The direction of buckle is controlled by the Lorentz force caused by the current flowing through the silicon beams to be buckled in the magnetic field applied, enabling the bidirectional motion of the torsional micromirror. At resonance, Lorentz force itself drives the actuator instead of thermal expansion force from the buckle beams. The maximum static angular displacement of the torsional actuator is 13.42° (26.84°, optical angle) under a driving dc voltage of 7.5 V. In the resonance mode operation, the measured angular displacement is 8.22° (16.44°, optical angle) at 10.64 kHz under sinusoidal driving voltages of 0 to 4.4 V.

Original languageEnglish
Article number065023
JournalJournal of Micromechanics and Microengineering
Volume19
Issue number6
DOIs
Publication statusPublished - 2009 Aug 12

Fingerprint

Microactuators
Silicon
Lorentz force
Actuators
Torsional stress
Thermal expansion
Electric potential
Masks
Single crystals
Magnetic fields
Direction compound

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

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title = "Bidirectional electrothermal electromagnetic torsional microactuators for large angular motion at dc mode and high frequency resonance mode operation",
abstract = "This paper presents a novel design of a bidirectional torsional micromirror utilizing vertically driven electrothermal electromagnetic silicon beam actuators to generate large angular motion in both static mode and high-frequency resonance mode with low operational voltages. The microactuators are fabricated on a silicon-on-insulator (SOI) wafer using three photo masks in order to form two different thicknesses of single crystal silicon (SCS) device layer and backside cavities. When the driving bias is applied to the device in the static mode operation, four buckle beams placed alongside the torsion bars are subjected to thermal expansion and buckle in the vertical direction generating torsional displacement of the micromirror with respect to two torsion bars, the center of rotation. The direction of buckle is controlled by the Lorentz force caused by the current flowing through the silicon beams to be buckled in the magnetic field applied, enabling the bidirectional motion of the torsional micromirror. At resonance, Lorentz force itself drives the actuator instead of thermal expansion force from the buckle beams. The maximum static angular displacement of the torsional actuator is 13.42° (26.84°, optical angle) under a driving dc voltage of 7.5 V. In the resonance mode operation, the measured angular displacement is 8.22° (16.44°, optical angle) at 10.64 kHz under sinusoidal driving voltages of 0 to 4.4 V.",
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Bidirectional electrothermal electromagnetic torsional microactuators for large angular motion at dc mode and high frequency resonance mode operation. / Eun, Youngkee; Na, Hyungjoo; Jeong, Bongwon; Lee, Jae Ik; Kim, Jongbaeg.

In: Journal of Micromechanics and Microengineering, Vol. 19, No. 6, 065023, 12.08.2009.

Research output: Contribution to journalArticle

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