Bimorph nano actuators synthesized by focused ion beam chemical vapor deposition

Jiyoung Chang, Byung Kwon Min, Jongbaeg Kim, Liwei Lin

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


Bimorph nano actuators synthesized by a two-layer focused ion beam (FIB) chemical vapor deposition (CVD) process have been demonstrated. The core bimorph segment of the actuator is a column structure made of two 200-nm thick tungsten-based-conductor (TBC) and diamond-like-carbon (DLC) layers. Several segments can be connected together of different angles to construct actuators with various moving capabilities when joule heating is applied via silicon MEMS (Microelectromechanical System) heater as the actuation source. Experimentally, a prototype five-segment actuator has shown projection displacement of 600 ± 60 nm under an input power of 1.02 W (160 mA and 6.41 V). The actuator has been repeatedly operated for over 100 times without any indication of degradation. As such, this work represents a new class of nano actuators based on versatile and flexible FIB-CVD bimorph nanostructures.

Original languageEnglish
Pages (from-to)2364-2368
Number of pages5
JournalMicroelectronic Engineering
Issue number11
Publication statusPublished - 2009 Nov

Bibliographical note

Funding Information:
This work was supported by the Korea Research Foundation Grant funded by the Korean Government (MOEHRD, Basic Research Promotion Fund) (KRF-2006-311-D00024) and Nano R&D program through the Korea Science and Engineering Foundation funded by the Ministry of Education, Science and Technology (2008-02916).

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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