Bimorph nano actuators synthesized by focused ion beam chemical vapor deposition

Jiyoung Chang, Byung-Kwon Min, Jongbaeg Kim, Liwei Lin

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Bimorph nano actuators synthesized by a two-layer focused ion beam (FIB) chemical vapor deposition (CVD) process have been demonstrated. The core bimorph segment of the actuator is a column structure made of two 200-nm thick tungsten-based-conductor (TBC) and diamond-like-carbon (DLC) layers. Several segments can be connected together of different angles to construct actuators with various moving capabilities when joule heating is applied via silicon MEMS (Microelectromechanical System) heater as the actuation source. Experimentally, a prototype five-segment actuator has shown projection displacement of 600 ± 60 nm under an input power of 1.02 W (160 mA and 6.41 V). The actuator has been repeatedly operated for over 100 times without any indication of degradation. As such, this work represents a new class of nano actuators based on versatile and flexible FIB-CVD bimorph nanostructures.

Original languageEnglish
Pages (from-to)2364-2368
Number of pages5
JournalMicroelectronic Engineering
Volume86
Issue number11
DOIs
Publication statusPublished - 2009 Nov 1

Fingerprint

Focused ion beams
Chemical vapor deposition
Actuators
actuators
ion beams
vapor deposition
Tungsten
Diamond
Joule heating
Silicon
actuation
heaters
microelectromechanical systems
MEMS
Nanostructures
Diamonds
tungsten
indication
Carbon
conductors

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

@article{a5d3f8060fd643e0bd04f2b90666780c,
title = "Bimorph nano actuators synthesized by focused ion beam chemical vapor deposition",
abstract = "Bimorph nano actuators synthesized by a two-layer focused ion beam (FIB) chemical vapor deposition (CVD) process have been demonstrated. The core bimorph segment of the actuator is a column structure made of two 200-nm thick tungsten-based-conductor (TBC) and diamond-like-carbon (DLC) layers. Several segments can be connected together of different angles to construct actuators with various moving capabilities when joule heating is applied via silicon MEMS (Microelectromechanical System) heater as the actuation source. Experimentally, a prototype five-segment actuator has shown projection displacement of 600 ± 60 nm under an input power of 1.02 W (160 mA and 6.41 V). The actuator has been repeatedly operated for over 100 times without any indication of degradation. As such, this work represents a new class of nano actuators based on versatile and flexible FIB-CVD bimorph nanostructures.",
author = "Jiyoung Chang and Byung-Kwon Min and Jongbaeg Kim and Liwei Lin",
year = "2009",
month = "11",
day = "1",
doi = "10.1016/j.mee.2009.04.022",
language = "English",
volume = "86",
pages = "2364--2368",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",
number = "11",

}

Bimorph nano actuators synthesized by focused ion beam chemical vapor deposition. / Chang, Jiyoung; Min, Byung-Kwon; Kim, Jongbaeg; Lin, Liwei.

In: Microelectronic Engineering, Vol. 86, No. 11, 01.11.2009, p. 2364-2368.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Bimorph nano actuators synthesized by focused ion beam chemical vapor deposition

AU - Chang, Jiyoung

AU - Min, Byung-Kwon

AU - Kim, Jongbaeg

AU - Lin, Liwei

PY - 2009/11/1

Y1 - 2009/11/1

N2 - Bimorph nano actuators synthesized by a two-layer focused ion beam (FIB) chemical vapor deposition (CVD) process have been demonstrated. The core bimorph segment of the actuator is a column structure made of two 200-nm thick tungsten-based-conductor (TBC) and diamond-like-carbon (DLC) layers. Several segments can be connected together of different angles to construct actuators with various moving capabilities when joule heating is applied via silicon MEMS (Microelectromechanical System) heater as the actuation source. Experimentally, a prototype five-segment actuator has shown projection displacement of 600 ± 60 nm under an input power of 1.02 W (160 mA and 6.41 V). The actuator has been repeatedly operated for over 100 times without any indication of degradation. As such, this work represents a new class of nano actuators based on versatile and flexible FIB-CVD bimorph nanostructures.

AB - Bimorph nano actuators synthesized by a two-layer focused ion beam (FIB) chemical vapor deposition (CVD) process have been demonstrated. The core bimorph segment of the actuator is a column structure made of two 200-nm thick tungsten-based-conductor (TBC) and diamond-like-carbon (DLC) layers. Several segments can be connected together of different angles to construct actuators with various moving capabilities when joule heating is applied via silicon MEMS (Microelectromechanical System) heater as the actuation source. Experimentally, a prototype five-segment actuator has shown projection displacement of 600 ± 60 nm under an input power of 1.02 W (160 mA and 6.41 V). The actuator has been repeatedly operated for over 100 times without any indication of degradation. As such, this work represents a new class of nano actuators based on versatile and flexible FIB-CVD bimorph nanostructures.

UR - http://www.scopus.com/inward/record.url?scp=69649097562&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=69649097562&partnerID=8YFLogxK

U2 - 10.1016/j.mee.2009.04.022

DO - 10.1016/j.mee.2009.04.022

M3 - Article

VL - 86

SP - 2364

EP - 2368

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

IS - 11

ER -